National Natural Science Foundation of China [61307063, 61405060]
; Doctor Foundation of Southwest University of Science and Technology of China [12zx7127]
; Open Foundation of Robot Technology Used for Special Environment Key Laboratory of Sichuan Province
1. Faculty Information and Engineering, Southwest University of Science and Technology Mianyang, Sichuan, China 2. Robot Technology Used for Special Environment Key Laboratory of Sichuan Province, Mianyang, Sichuan, China 3. School of Electronics and Information, South China University of Technology, Guangzhou, China 4. Institute Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 5. School of Electronics Engineering and Electronic Information, Xihua University, Chengdu, China
Xu, Feng,Zhou, Shaolin,Hu, Song,et al. Moiré fringe alignment using composite circular-line gratings for proximity lithography[J]. Optics Express,2015,23(16):20905-20915.