题名: Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System
作者: Zhou, Yi 1,2 ; Zhu, Jiangping 3 ; Deng, Qinyuan 1,2 ; Liu, Junbo 1,2 ; Si, Xinchun 1,2 ; Hu, Song 1
刊名: IEEE Photonics Journal
出版日期: 2015
卷号: 7, 期号: 6, 页码: 3900311 学科分类: Calibration
DOI: 10.1109/JPHOT.2015.2500892
通讯作者: Zhou, Yi (alanzhouyi@163.com)
文章类型: 期刊论文
中文摘要: The bitelecentric lens system is widely used in many domains, such as 3-D measurements and tube inspection. The magnification calibration for such a system is a crucial problem for its further application in achieving precise measurements. However, it is difficult to obtain an accurate result using a general magnification calibration method. In this paper, the Moiré-based interferometry is demonstrated to accurately calibrate the magnification of bitelecentric lens system that increases the speed and precision of the measurement. Two special grating marks containing upper and lower parts with slightly different periods are designed to generate Moiré fringes. By analyzing the finally obtained Moiré fringes, the magnification could be determined through Fourier-based phase analysis and a phase unwrapping algorithm, and the further the deviation is from the theoretical value, the more obvious the differences between upper and lower periods will be. Both simulations and experiments are conducted to verify the feasibility and effectiveness of the proposed approach. Results indicate that the magnification could be calibrated at the accuracy of 0.4% with extraordinary sensitivity. © 2009-2012 IEEE. 英文摘要: The bitelecentric lens system is widely used in many domains, such as 3-D measurements and tube inspection. The magnification calibration for such a system is a crucial problem for its further application in achieving precise measurements. However, it is difficult to obtain an accurate result using a general magnification calibration method. In this paper, the Moiré-based interferometry is demonstrated to accurately calibrate the magnification of bitelecentric lens system that increases the speed and precision of the measurement. Two special grating marks containing upper and lower parts with slightly different periods are designed to generate Moiré fringes. By analyzing the finally obtained Moiré fringes, the magnification could be determined through Fourier-based phase analysis and a phase unwrapping algorithm, and the further the deviation is from the theoretical value, the more obvious the differences between upper and lower periods will be. Both simulations and experiments are conducted to verify the feasibility and effectiveness of the proposed approach. Results indicate that the magnification could be calibrated at the accuracy of 0.4% with extraordinary sensitivity. © 2009-2012 IEEE. 收录类别: SCI
; Ei
项目资助者: Natural Science Foundation of China [61204114]
; Opening Project of State Key Laboratory of Polymer Materials Engineering, Sichuan University [2015-4-28]
; China Postdoctoral Science Foundation [2015M572471]
语种: 英语
WOS记录号: WOS:000367248500019
ISSN号: 1943-0655
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内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7323
Appears in Collections: 微电子装备总体研究室（四室）_期刊论文
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作者单位: 1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Recommended Citation:
Zhou, Yi,Zhu, Jiangping,Deng, Qinyuan,et al. Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System[J]. IEEE Photonics Journal,2015,7(6):3900311.
