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Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System
Zhou, Yi1,2; Zhu, Jiangping3; Deng, Qinyuan1,2; Liu, Junbo1,2; Si, Xinchun1,2; Hu, Song1; Zhou, Yi (alanzhouyi@163.com)
Source PublicationIEEE Photonics Journal
Volume7Issue:6Pages:3900311
2015
Language英语
ISSN1943-0655
DOI10.1109/JPHOT.2015.2500892
Indexed BySCI ; Ei
WOS IDWOS:000367248500019
Subtype期刊论文
AbstractThe bitelecentric lens system is widely used in many domains, such as 3-D measurements and tube inspection. The magnification calibration for such a system is a crucial problem for its further application in achieving precise measurements. However, it is difficult to obtain an accurate result using a general magnification calibration method. In this paper, the Moiré-based interferometry is demonstrated to accurately calibrate the magnification of bitelecentric lens system that increases the speed and precision of the measurement. Two special grating marks containing upper and lower parts with slightly different periods are designed to generate Moiré fringes. By analyzing the finally obtained Moiré fringes, the magnification could be determined through Fourier-based phase analysis and a phase unwrapping algorithm, and the further the deviation is from the theoretical value, the more obvious the differences between upper and lower periods will be. Both simulations and experiments are conducted to verify the feasibility and effectiveness of the proposed approach. Results indicate that the magnification could be calibrated at the accuracy of 0.4% with extraordinary sensitivity. © 2009-2012 IEEE.; The bitelecentric lens system is widely used in many domains, such as 3-D measurements and tube inspection. The magnification calibration for such a system is a crucial problem for its further application in achieving precise measurements. However, it is difficult to obtain an accurate result using a general magnification calibration method. In this paper, the Moiré-based interferometry is demonstrated to accurately calibrate the magnification of bitelecentric lens system that increases the speed and precision of the measurement. Two special grating marks containing upper and lower parts with slightly different periods are designed to generate Moiré fringes. By analyzing the finally obtained Moiré fringes, the magnification could be determined through Fourier-based phase analysis and a phase unwrapping algorithm, and the further the deviation is from the theoretical value, the more obvious the differences between upper and lower periods will be. Both simulations and experiments are conducted to verify the feasibility and effectiveness of the proposed approach. Results indicate that the magnification could be calibrated at the accuracy of 0.4% with extraordinary sensitivity. © 2009-2012 IEEE.
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Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7323
Collection微电子装备总体研究室(四室)
Corresponding AuthorZhou, Yi (alanzhouyi@163.com)
Affiliation1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. University of Chinese Academy of Sciences, Beijing, China
3. School of Computer Science and Technology, Sichuan University, Chengdu, China
Recommended Citation
GB/T 7714
Zhou, Yi,Zhu, Jiangping,Deng, Qinyuan,et al. Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System[J]. IEEE Photonics Journal,2015,7(6):3900311.
APA Zhou, Yi.,Zhu, Jiangping.,Deng, Qinyuan.,Liu, Junbo.,Si, Xinchun.,...&Zhou, Yi .(2015).Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System.IEEE Photonics Journal,7(6),3900311.
MLA Zhou, Yi,et al."Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System".IEEE Photonics Journal 7.6(2015):3900311.
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