中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 微电子装备总体研究室(四室)  > 期刊论文
题名:
Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process
作者: Zhou, Shaolin1; Yang, Yong2; Hu, Song2; Xu, Xiangmin1
刊名: IEEE Photonics Journal
出版日期: 2015
卷号: 7, 期号:4, 页码:4900111
学科分类: Amplitude modulation - Diffraction - Diffraction efficiency - Efficiency - Modulation - Phase modulation
DOI: 10.1109/JPHOT.2015.2447938
通讯作者: Zhou, Shaolin (shaolinzhou@gmail.com)
文章类型: 期刊论文
中文摘要: The diffraction characteristics of several types of phase gratings often etched on the substrate by the micro/nanofabrication techniques are analytically explored using scalar-based analysis in this paper. The process of an incident wave being reflected or transmitted by the diffraction grating is regarded as a process of modulation, and the reflectance or transmittance can be unified as the modulation index. The mechanisms of phase modulation, amplitude modulation, and the amplitude-phase hybrid modulation in different situations are discussed. Analytical results indicate that the diffraction efficiency is directly determined by the phase difference of adjacent features, i.e., the cyclically distributed ridges and grooves that induce different phase and amplitude variations. The absolute phase grating with phase difference equivalent to π has the maximum diffraction efficiency among all types of gratings. The conclusions could, in general, provide guidance for the design and micro/nanofabrication of phase gratings for many diffraction-based applications of optical metrology or imaging. © 2009-2012 IEEE.
英文摘要: The diffraction characteristics of several types of phase gratings often etched on the substrate by the micro/nanofabrication techniques are analytically explored using scalar-based analysis in this paper. The process of an incident wave being reflected or transmitted by the diffraction grating is regarded as a process of modulation, and the reflectance or transmittance can be unified as the modulation index. The mechanisms of phase modulation, amplitude modulation, and the amplitude-phase hybrid modulation in different situations are discussed. Analytical results indicate that the diffraction efficiency is directly determined by the phase difference of adjacent features, i.e., the cyclically distributed ridges and grooves that induce different phase and amplitude variations. The absolute phase grating with phase difference equivalent to pai has the maximum diffraction efficiency among all types of gratings. The conclusions could, in general, provide guidance for the design and micro/nanofabrication of phase gratings for many diffraction-based applications of optical metrology or imaging. © 2009-2012 IEEE.
收录类别: SCI ; Ei
项目资助者: National Natural Science Foundation of China [61405060, 61307063] ; Science and Technology Planning Project of Guangdong Province [2014A010104005] ; Central Universities of South China University of Technology [2015 ZZ029] ; Opening Project of State Key labo
语种: 英语
WOS记录号: WOS:000361069900025
ISSN号: 1943-0655
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7322
Appears in Collections:微电子装备总体研究室(四室)_期刊论文

Files in This Item:
File Name/ File Size Content Type Version Access License
2015-2082.pdf(920KB)期刊论文作者接受稿开放获取View 联系获取全文

作者单位: 1. School of Electronic and Information Engineering, South China University of Technology, Guangzhou, China
2. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China

Recommended Citation:
Zhou, Shaolin,Yang, Yong,Hu, Song,et al. Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process[J]. IEEE Photonics Journal,2015,7(4):4900111.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Zhou, Shaolin]'s Articles
[Yang, Yong]'s Articles
[Hu, Song]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Zhou, Shaolin]‘s Articles
[Yang, Yong]‘s Articles
[Hu, Song]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: 2015-2082.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace