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Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process
Zhou, Shaolin1; Yang, Yong2; Hu, Song2; Xu, Xiangmin1; Zhou, Shaolin (shaolinzhou@gmail.com)
Source PublicationIEEE Photonics Journal
Volume7Issue:4Pages:4900111
2015
Language英语
ISSN1943-0655
DOI10.1109/JPHOT.2015.2447938
Indexed BySCI ; Ei
WOS IDWOS:000361069900025
Subtype期刊论文
AbstractThe diffraction characteristics of several types of phase gratings often etched on the substrate by the micro/nanofabrication techniques are analytically explored using scalar-based analysis in this paper. The process of an incident wave being reflected or transmitted by the diffraction grating is regarded as a process of modulation, and the reflectance or transmittance can be unified as the modulation index. The mechanisms of phase modulation, amplitude modulation, and the amplitude-phase hybrid modulation in different situations are discussed. Analytical results indicate that the diffraction efficiency is directly determined by the phase difference of adjacent features, i.e., the cyclically distributed ridges and grooves that induce different phase and amplitude variations. The absolute phase grating with phase difference equivalent to π has the maximum diffraction efficiency among all types of gratings. The conclusions could, in general, provide guidance for the design and micro/nanofabrication of phase gratings for many diffraction-based applications of optical metrology or imaging. © 2009-2012 IEEE.; The diffraction characteristics of several types of phase gratings often etched on the substrate by the micro/nanofabrication techniques are analytically explored using scalar-based analysis in this paper. The process of an incident wave being reflected or transmitted by the diffraction grating is regarded as a process of modulation, and the reflectance or transmittance can be unified as the modulation index. The mechanisms of phase modulation, amplitude modulation, and the amplitude-phase hybrid modulation in different situations are discussed. Analytical results indicate that the diffraction efficiency is directly determined by the phase difference of adjacent features, i.e., the cyclically distributed ridges and grooves that induce different phase and amplitude variations. The absolute phase grating with phase difference equivalent to pai has the maximum diffraction efficiency among all types of gratings. The conclusions could, in general, provide guidance for the design and micro/nanofabrication of phase gratings for many diffraction-based applications of optical metrology or imaging. © 2009-2012 IEEE.
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Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7322
Collection微电子装备总体研究室(四室)
Corresponding AuthorZhou, Shaolin (shaolinzhou@gmail.com)
Affiliation1. School of Electronic and Information Engineering, South China University of Technology, Guangzhou, China
2. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
Recommended Citation
GB/T 7714
Zhou, Shaolin,Yang, Yong,Hu, Song,et al. Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process[J]. IEEE Photonics Journal,2015,7(4):4900111.
APA Zhou, Shaolin,Yang, Yong,Hu, Song,Xu, Xiangmin,&Zhou, Shaolin .(2015).Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process.IEEE Photonics Journal,7(4),4900111.
MLA Zhou, Shaolin,et al."Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process".IEEE Photonics Journal 7.4(2015):4900111.
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