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题名:
Nanolithography method with controllable critical dimension based on evanescent waves coupling
作者: Zhang, Yukun1,2,3; Du, Jinglei1; Yin, Shaoyun2; Gao, Hongtao3; Xia, Liangping2; Shi, Lifang3; Du, Chunlei2; Zhang, Zhiyou1
刊名: Optik
出版日期: 2014
卷号: 125, 期号:13, 页码:3201-3203
学科分类: Electric fields - Electromagnetic wave reflection - Finite difference time domain method - Nanolithography - Nanostructures
DOI: 10.1016/j.ijleo.2014.01.024
通讯作者: Zhang, Z. (zhangzhiyou@scu.edu.cn)
文章类型: 期刊论文
中文摘要: We propose a method of generating nanostructures based on evanescent waves coupling. The nanopatterns with ultra-high resolution can be formed by the interference of the evanescent waves between the pattern edges of the mold. Through properly adjusting the width of the mold groove, critical dimension of the nanopatterns can be effectively controlled. The critical dimension of the electric field versus the width of the mold groove is systematically calculated by finite-difference time-domain method. The calculation results demonstrate that through adjusting the geometric parameters of the mold, critical dimension of the electric field can be controlled within the range of 30 nm and 100 nm, and the contrast ratio is above 60%. This method provides an easy way for fabricating nanostructures with various dimensions corresponding to the mold patterns and it maybe useful in the applications such as integrate circuits, ultra-high sensitive sensors, and optical storage. © 2014 Elsevier GmbH.
英文摘要: We propose a method of generating nanostructures based on evanescent waves coupling. The nanopatterns with ultra-high resolution can be formed by the interference of the evanescent waves between the pattern edges of the mold. Through properly adjusting the width of the mold groove, critical dimension of the nanopatterns can be effectively controlled. The critical dimension of the electric field versus the width of the mold groove is systematically calculated by finite-difference time-domain method. The calculation results demonstrate that through adjusting the geometric parameters of the mold, critical dimension of the electric field can be controlled within the range of 30 nm and 100 nm, and the contrast ratio is above 60%. This method provides an easy way for fabricating nanostructures with various dimensions corresponding to the mold patterns and it maybe useful in the applications such as integrate circuits, ultra-high sensitive sensors, and optical storage. © 2014 Elsevier GmbH.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000337656400047
ISSN号: 00304026
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7304
Appears in Collections:微电子装备总体研究室(四室)_期刊论文

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作者单位: 1. Physics Department, Sichuan University, Chengdu, Sichuan Province 610064, China
2. Chongqing Institute of Green and Intelligent of Chinese Academy of Sciences, Chongqing 401122, China
3. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan Province 610209, China

Recommended Citation:
Zhang, Yukun,Du, Jinglei,Yin, Shaoyun,et al. Nanolithography method with controllable critical dimension based on evanescent waves coupling[J]. Optik,2014,125(13):3201-3203.
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