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Fabrication of circular microstructure array based on a controlled diffractive pattern
Li, Shuhong1,2; Du, Jinglei1; Zhang, Zhiyou1; Gao, Fuhua1; Gao, Hongtao2; Du, Chunlei2; Li, S. (lsh2772@scu.edu.cn)
Source PublicationMicroelectronic Engineering
Volume115Pages:13-15
2014
Language英语
ISSN01679317
DOI10.1016/j.mee.2013.10.015
Indexed BySCI ; Ei
WOS IDWOS:000330502700004
Subtype期刊论文
AbstractSubwavelength metal circular structures have wide potential applications for the higher transmission efficiency than holes. A circular structures fabrication method is demonstrated by employing the diffraction pattern generated with some available regular structures. The inversion algorithm of the parameters of diffractive object is built from the required diffractive pattern based on the scalar diffractive theory. To validate the approach, a circular screen in array with size of 1.1 μm was designed and fabricated as mask. Finally, an annulus array with feature size of 680 nm is formed in the resist. © 2013 Elsevier B.V. All rights reserved.; Subwavelength metal circular structures have wide potential applications for the higher transmission efficiency than holes. A circular structures fabrication method is demonstrated by employing the diffraction pattern generated with some available regular structures. The inversion algorithm of the parameters of diffractive object is built from the required diffractive pattern based on the scalar diffractive theory. To validate the approach, a circular screen in array with size of 1.1 μm was designed and fabricated as mask. Finally, an annulus array with feature size of 680 nm is formed in the resist. © 2013 Elsevier B.V. All rights reserved.
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Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7298
Collection微电子装备总体研究室(四室)
Corresponding AuthorLi, S. (lsh2772@scu.edu.cn)
Affiliation1. School of Physics, Sichuan University, Chengdu 610064, China
2. Institute of Optics and Electronics, CAS, P.O. Box 350, Chengdu 610209, China
Recommended Citation
GB/T 7714
Li, Shuhong,Du, Jinglei,Zhang, Zhiyou,et al. Fabrication of circular microstructure array based on a controlled diffractive pattern[J]. Microelectronic Engineering,2014,115:13-15.
APA Li, Shuhong.,Du, Jinglei.,Zhang, Zhiyou.,Gao, Fuhua.,Gao, Hongtao.,...&Li, S. .(2014).Fabrication of circular microstructure array based on a controlled diffractive pattern.Microelectronic Engineering,115,13-15.
MLA Li, Shuhong,et al."Fabrication of circular microstructure array based on a controlled diffractive pattern".Microelectronic Engineering 115(2014):13-15.
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