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题名:
Fabrication of circular microstructure array based on a controlled diffractive pattern
作者: Li, Shuhong1,2; Du, Jinglei1; Zhang, Zhiyou1; Gao, Fuhua1; Gao, Hongtao2; Du, Chunlei2
刊名: Microelectronic Engineering
出版日期: 2014
卷号: 115, 页码:13-15
学科分类: Lithography - Microstructure
DOI: 10.1016/j.mee.2013.10.015
通讯作者: Li, S. (lsh2772@scu.edu.cn)
文章类型: 期刊论文
中文摘要: Subwavelength metal circular structures have wide potential applications for the higher transmission efficiency than holes. A circular structures fabrication method is demonstrated by employing the diffraction pattern generated with some available regular structures. The inversion algorithm of the parameters of diffractive object is built from the required diffractive pattern based on the scalar diffractive theory. To validate the approach, a circular screen in array with size of 1.1 μm was designed and fabricated as mask. Finally, an annulus array with feature size of 680 nm is formed in the resist. © 2013 Elsevier B.V. All rights reserved.
英文摘要: Subwavelength metal circular structures have wide potential applications for the higher transmission efficiency than holes. A circular structures fabrication method is demonstrated by employing the diffraction pattern generated with some available regular structures. The inversion algorithm of the parameters of diffractive object is built from the required diffractive pattern based on the scalar diffractive theory. To validate the approach, a circular screen in array with size of 1.1 μm was designed and fabricated as mask. Finally, an annulus array with feature size of 680 nm is formed in the resist. © 2013 Elsevier B.V. All rights reserved.
收录类别: SCI ; Ei
项目资助者: National Natural Science Foundation of China [61078047]
语种: 英语
WOS记录号: WOS:000330502700004
ISSN号: 01679317
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7298
Appears in Collections:微电子装备总体研究室(四室)_期刊论文

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作者单位: 1. School of Physics, Sichuan University, Chengdu 610064, China
2. Institute of Optics and Electronics, CAS, P.O. Box 350, Chengdu 610209, China

Recommended Citation:
Li, Shuhong,Du, Jinglei,Zhang, Zhiyou,et al. Fabrication of circular microstructure array based on a controlled diffractive pattern[J]. Microelectronic Engineering,2014,115:13-15.
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