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Collimation sensing with differential grating and talbot interferometry
Wang, Nan1,2; Tang, Yan1; Jiang, Wei1; Yan, Wei1; Hu, Song1; Wang, N. (705679317@qq.com)
Source PublicationIEEE Photonics Journal
Volume6Issue:3Pages:6799212
2014
Language英语
ISSN19430655
DOI10.1109/JPHOT.2014.2317678
Indexed BySCI ; Ei
WOS IDWOS:000340830400025
Subtype期刊论文
AbstractThe collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moire´ fringes. By analyzing the relationship between the phase of moire´ fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10^{-7}\ \hbox{rad}, which is in good agreement with the theoretical prediction. © 2009-2012 IEEE.; The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moire´ fringes. By analyzing the relationship between the phase of moire´ fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10^{-7}\ \hbox{rad}, which is in good agreement with the theoretical prediction. © 2009-2012 IEEE.
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Cited Times:5[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7297
Collection微电子装备总体研究室(四室)
Corresponding AuthorWang, N. (705679317@qq.com)
Affiliation1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Wang, Nan,Tang, Yan,Jiang, Wei,et al. Collimation sensing with differential grating and talbot interferometry[J]. IEEE Photonics Journal,2014,6(3):6799212.
APA Wang, Nan,Tang, Yan,Jiang, Wei,Yan, Wei,Hu, Song,&Wang, N. .(2014).Collimation sensing with differential grating and talbot interferometry.IEEE Photonics Journal,6(3),6799212.
MLA Wang, Nan,et al."Collimation sensing with differential grating and talbot interferometry".IEEE Photonics Journal 6.3(2014):6799212.
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