| Collimation sensing with differential grating and talbot interferometry | |
| Wang, Nan1,2; Tang, Yan1; Jiang, Wei1; Yan, Wei1; Hu, Song1; Wang, N. (705679317@qq.com) | |
| Source Publication | IEEE Photonics Journal
 |
| Volume | 6Issue:3Pages:6799212 |
| 2014 | |
| Language | 英语 |
| ISSN | 19430655 |
| DOI | 10.1109/JPHOT.2014.2317678 |
| Indexed By | SCI ; Ei |
| WOS ID | WOS:000340830400025 |
| Subtype | 期刊论文 |
| Abstract | The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moire´ fringes. By analyzing the relationship between the phase of moire´ fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10^{-7}\ \hbox{rad}, which is in good agreement with the theoretical prediction. © 2009-2012 IEEE.; The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moire´ fringes. By analyzing the relationship between the phase of moire´ fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10^{-7}\ \hbox{rad}, which is in good agreement with the theoretical prediction. © 2009-2012 IEEE. |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7297 |
| Collection | 微电子装备总体研究室（四室） |
| Corresponding Author | Wang, N. (705679317@qq.com) |
| Affiliation | 1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2. University of Chinese Academy of Sciences, Beijing 100039, China |
| Recommended Citation GB/T 7714 | Wang, Nan,Tang, Yan,Jiang, Wei,et al. Collimation sensing with differential grating and talbot interferometry[J]. IEEE Photonics Journal,2014,6(3):6799212. |
| APA | Wang, Nan,Tang, Yan,Jiang, Wei,Yan, Wei,Hu, Song,&Wang, N. .(2014).Collimation sensing with differential grating and talbot interferometry.IEEE Photonics Journal,6(3),6799212. |
| MLA | Wang, Nan,et al."Collimation sensing with differential grating and talbot interferometry".IEEE Photonics Journal 6.3(2014):6799212. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2014-2029.pdf（1155KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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