题名: Collimation sensing with differential grating and talbot interferometry
作者: Wang, Nan 1,2 ; Tang, Yan 1 ; Jiang, Wei 1 ; Yan, Wei 1 ; Hu, Song 1
刊名: IEEE Photonics Journal
出版日期: 2014
卷号: 6, 期号: 3, 页码: 6799212 学科分类: Testing
DOI: 10.1109/JPHOT.2014.2317678
通讯作者: Wang, N. (705679317@qq.com)
文章类型: 期刊论文
中文摘要: The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moire´ fringes. By analyzing the relationship between the phase of moire´ fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10^{-7}\ \hbox{rad}, which is in good agreement with the theoretical prediction. © 2009-2012 IEEE. 英文摘要: The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moire´ fringes. By analyzing the relationship between the phase of moire´ fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10^{-7}\ \hbox{rad}, which is in good agreement with the theoretical prediction. © 2009-2012 IEEE. 收录类别: SCI
; Ei
项目资助者: National Natural Science Foundation of China [61274108, 61274114]
语种: 英语
WOS记录号: WOS:000340830400025
ISSN号: 19430655
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内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7297
Appears in Collections: 微电子装备总体研究室（四室）_期刊论文
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作者单位: 1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
Recommended Citation:
Wang, Nan,Tang, Yan,Jiang, Wei,et al. Collimation sensing with differential grating and talbot interferometry[J]. IEEE Photonics Journal,2014,6(3):6799212.
