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题名:
Focal length measurement of a microlens-array by grating shearing interferometry
作者: Zhu, Xianchang; Hu, Song; Zhao, Lixin
刊名: Applied Optics
出版日期: 2014
卷号: 53, 期号:29, 页码:6663-6669
学科分类: Microlenses - Optical instrument lenses - Shearing - Uncertainty analysis - Wavefronts
DOI: 10.1364/AO.53.006663
通讯作者: Zhu, Xianchang
文章类型: 期刊论文
中文摘要: Based on grating shearing interferometry, a simple technique is introduced for focal length measurements of a microlens-array (MLA). The measurement system is composed of a He-Ne laser, condenser, collimator, the MLA under testing, a Ronchi grating, and CCD sensor. The plane wavefront from the collimator is transformed to a spherical wavefront by the MLA, while the curvature center is at the focus. Interference stripes appear at the overlap between the zero-order and first-order diffractive patterns of the grating and are detected by the CCD sensor. By analyzing the period change of stripes, the focal length is determined after the defocus of the grating is calculated. To validate the feasibility, an experiment is performed. The measurement uncertainty is discussed and measurement accuracy was determined to be 2%. © 2014 Optical Society of America.
英文摘要: Based on grating shearing interferometry, a simple technique is introduced for focal length measurements of a microlens-array (MLA). The measurement system is composed of a He-Ne laser, condenser, collimator, the MLA under testing, a Ronchi grating, and CCD sensor. The plane wavefront from the collimator is transformed to a spherical wavefront by the MLA, while the curvature center is at the focus. Interference stripes appear at the overlap between the zero-order and first-order diffractive patterns of the grating and are detected by the CCD sensor. By analyzing the period change of stripes, the focal length is determined after the defocus of the grating is calculated. To validate the feasibility, an experiment is performed. The measurement uncertainty is discussed and measurement accuracy was determined to be 2%. © 2014 Optical Society of America.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000343160200041
ISSN号: 1559-128X
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7294
Appears in Collections:微电子装备总体研究室(四室)_期刊论文

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作者单位: State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China

Recommended Citation:
Zhu, Xianchang,Hu, Song,Zhao, Lixin. Focal length measurement of a microlens-array by grating shearing interferometry[J]. Applied Optics,2014,53(29):6663-6669.
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