IOE OpenIR  > 微电子装备总体研究室(四室)
Focal length measurement of a microlens-array by grating shearing interferometry
Zhu, Xianchang; Hu, Song; Zhao, Lixin
Source PublicationApplied Optics
Volume53Issue:29Pages:6663-6669
2014
Language英语
ISSN1559-128X
DOI10.1364/AO.53.006663
Indexed BySCI ; Ei
WOS IDWOS:000343160200041
Subtype期刊论文
AbstractBased on grating shearing interferometry, a simple technique is introduced for focal length measurements of a microlens-array (MLA). The measurement system is composed of a He-Ne laser, condenser, collimator, the MLA under testing, a Ronchi grating, and CCD sensor. The plane wavefront from the collimator is transformed to a spherical wavefront by the MLA, while the curvature center is at the focus. Interference stripes appear at the overlap between the zero-order and first-order diffractive patterns of the grating and are detected by the CCD sensor. By analyzing the period change of stripes, the focal length is determined after the defocus of the grating is calculated. To validate the feasibility, an experiment is performed. The measurement uncertainty is discussed and measurement accuracy was determined to be 2%. © 2014 Optical Society of America.; Based on grating shearing interferometry, a simple technique is introduced for focal length measurements of a microlens-array (MLA). The measurement system is composed of a He-Ne laser, condenser, collimator, the MLA under testing, a Ronchi grating, and CCD sensor. The plane wavefront from the collimator is transformed to a spherical wavefront by the MLA, while the curvature center is at the focus. Interference stripes appear at the overlap between the zero-order and first-order diffractive patterns of the grating and are detected by the CCD sensor. By analyzing the period change of stripes, the focal length is determined after the defocus of the grating is calculated. To validate the feasibility, an experiment is performed. The measurement uncertainty is discussed and measurement accuracy was determined to be 2%. © 2014 Optical Society of America.
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7294
Collection微电子装备总体研究室(四室)
Corresponding AuthorZhu, Xianchang
Affiliation State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China
Recommended Citation
GB/T 7714
Zhu, Xianchang,Hu, Song,Zhao, Lixin. Focal length measurement of a microlens-array by grating shearing interferometry[J]. Applied Optics,2014,53(29):6663-6669.
APA Zhu, Xianchang,Hu, Song,&Zhao, Lixin.(2014).Focal length measurement of a microlens-array by grating shearing interferometry.Applied Optics,53(29),6663-6669.
MLA Zhu, Xianchang,et al."Focal length measurement of a microlens-array by grating shearing interferometry".Applied Optics 53.29(2014):6663-6669.
Files in This Item:
File Name/Size DocType Version Access License
2014-2005.pdf(522KB)期刊论文作者接受稿开放获取CC BY-NC-SAView Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Zhu, Xianchang]'s Articles
[Hu, Song]'s Articles
[Zhao, Lixin]'s Articles
Baidu academic
Similar articles in Baidu academic
[Zhu, Xianchang]'s Articles
[Hu, Song]'s Articles
[Zhao, Lixin]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Zhu, Xianchang]'s Articles
[Hu, Song]'s Articles
[Zhao, Lixin]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: 2014-2005.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.