中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 微电子装备总体研究室(四室)  > 期刊论文
题名:
Moiré-based phase imaging for sensing and adjustment of in-plane twist angle
作者: Zhou, Shaolin1; Xie, Changqing2; Yang, Yong3; Hu, Song3; Xu, Xiangmin4; Yang, Jun5
刊名: IEEE Photonics Technology Letters
出版日期: 2013
卷号: 25, 期号:18, 页码:1847-1850
学科分类: Alignment - Lithography - Nanoimprint lithography - Photolithography
DOI: 10.1109/LPT.2013.2278240
文章类型: 期刊论文
中文摘要: We explore the feasibility of a controllable and easyto- implement moirE´-based phase-sensitive imaging scheme for inplane twist angle sensing and adjustment between two parallel planes, e.g., the optical alignment in nanoimprint lithography, photolithography, and X-ray lithography. The fundamental derivation of in-plane twist angle detection is given. Any angle variations can be readily sensed and monitored by the phase shift of optical field that occurs at the surface of two overlapped gratings. The performances of a circular grating and a specially designed composite linear grating were tested. Computational and experimental results show that the in-plane twist angle can be readily sensed and remedied within the magnitude of 10-4 rad even in a manual operation mode by this method. © 1989-2012 IEEE.
英文摘要: We explore the feasibility of a controllable and easyto- implement moirE´-based phase-sensitive imaging scheme for inplane twist angle sensing and adjustment between two parallel planes, e.g., the optical alignment in nanoimprint lithography, photolithography, and X-ray lithography. The fundamental derivation of in-plane twist angle detection is given. Any angle variations can be readily sensed and monitored by the phase shift of optical field that occurs at the surface of two overlapped gratings. The performances of a circular grating and a specially designed composite linear grating were tested. Computational and experimental results show that the in-plane twist angle can be readily sensed and remedied within the magnitude of 10-4 rad even in a manual operation mode by this method. © 1989-2012 IEEE.
收录类别: SCI ; Ei
项目资助者: Fundamental Research Funds for the Central Universities of South China University of Technology ; National Natural Science Foundation of China [61275170]
语种: 英语
WOS记录号: WOS:000324335500010
ISSN号: 10411135
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7288
Appears in Collections:微电子装备总体研究室(四室)_期刊论文

Files in This Item:
File Name/ File Size Content Type Version Access License
2013-2118.pdf(1286KB)期刊论文作者接受稿开放获取View 联系获取全文

作者单位: 1. School of Electronic and Information Engineering, South China University of Technology, Department of Mechanical and Materials Engineering, London, ON N6A 5B9, Canada
2. Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
3. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
4. School of Electronic and Information Engineering, South China University of Technology, Guangdong 510641, China
5. Department of Mechanical and Materials Engineering, Western University, University of Western Ontario, London, ON N6A 5B9, Canada

Recommended Citation:
Zhou, Shaolin,Xie, Changqing,Yang, Yong,et al. Moiré-based phase imaging for sensing and adjustment of in-plane twist angle[J]. IEEE Photonics Technology Letters,2013,25(18):1847-1850.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Zhou, Shaolin]'s Articles
[Xie, Changqing]'s Articles
[Yang, Yong]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Zhou, Shaolin]‘s Articles
[Xie, Changqing]‘s Articles
[Yang, Yong]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: 2013-2118.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace