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Moiré-based phase imaging for sensing and adjustment of in-plane twist angle
Zhou, Shaolin1; Xie, Changqing2; Yang, Yong3; Hu, Song3; Xu, Xiangmin4; Yang, Jun5
Source PublicationIEEE Photonics Technology Letters
Volume25Issue:18Pages:1847-1850
2013
Language英语
ISSN10411135
DOI10.1109/LPT.2013.2278240
Indexed BySCI ; Ei
WOS IDWOS:000324335500010
Subtype期刊论文
AbstractWe explore the feasibility of a controllable and easyto- implement moirE´-based phase-sensitive imaging scheme for inplane twist angle sensing and adjustment between two parallel planes, e.g., the optical alignment in nanoimprint lithography, photolithography, and X-ray lithography. The fundamental derivation of in-plane twist angle detection is given. Any angle variations can be readily sensed and monitored by the phase shift of optical field that occurs at the surface of two overlapped gratings. The performances of a circular grating and a specially designed composite linear grating were tested. Computational and experimental results show that the in-plane twist angle can be readily sensed and remedied within the magnitude of 10-4 rad even in a manual operation mode by this method. © 1989-2012 IEEE.; We explore the feasibility of a controllable and easyto- implement moirE´-based phase-sensitive imaging scheme for inplane twist angle sensing and adjustment between two parallel planes, e.g., the optical alignment in nanoimprint lithography, photolithography, and X-ray lithography. The fundamental derivation of in-plane twist angle detection is given. Any angle variations can be readily sensed and monitored by the phase shift of optical field that occurs at the surface of two overlapped gratings. The performances of a circular grating and a specially designed composite linear grating were tested. Computational and experimental results show that the in-plane twist angle can be readily sensed and remedied within the magnitude of 10-4 rad even in a manual operation mode by this method. © 1989-2012 IEEE.
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Cited Times:10[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7288
Collection微电子装备总体研究室(四室)
Affiliation1. School of Electronic and Information Engineering, South China University of Technology, Department of Mechanical and Materials Engineering, London, ON N6A 5B9, Canada
2. Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
3. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
4. School of Electronic and Information Engineering, South China University of Technology, Guangdong 510641, China
5. Department of Mechanical and Materials Engineering, Western University, University of Western Ontario, London, ON N6A 5B9, Canada
Recommended Citation
GB/T 7714
Zhou, Shaolin,Xie, Changqing,Yang, Yong,et al. Moiré-based phase imaging for sensing and adjustment of in-plane twist angle[J]. IEEE Photonics Technology Letters,2013,25(18):1847-1850.
APA Zhou, Shaolin,Xie, Changqing,Yang, Yong,Hu, Song,Xu, Xiangmin,&Yang, Jun.(2013).Moiré-based phase imaging for sensing and adjustment of in-plane twist angle.IEEE Photonics Technology Letters,25(18),1847-1850.
MLA Zhou, Shaolin,et al."Moiré-based phase imaging for sensing and adjustment of in-plane twist angle".IEEE Photonics Technology Letters 25.18(2013):1847-1850.
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