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Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly
Tang Yan; Su Xianyu; Hu Song; Tang Y (Tang Yan)
Source PublicationAPPLIED OPTICS
Volume50Issue:31Pages:5944-5948
2011
Language英语
Subtype期刊论文
AbstractA method based on fringe reflection is proposed to measure the optical axis of an aspheric mirror precisely and flexibly. In the measurement, a screen displaying a fringe pattern is moved along its normal direction, and a camera is located beside and observes the fringe pattern reflected via a tested surface. This method can test the optical axis of an aspheric mirror quantitatively before measuring the absolute hEight of the tested surface. And it can be combined with some presented methods that need to fit the aspheric mirror according to the optical axis to measure the surface. To validate the ability of this method, it is combined with one of the presented methods to measure absolute hEight of an aspheric mirror precisely and flexibly. Computer simulations and preliminary experiment validate the feasibility of this method. (C) 2011 Optical Society of America; A method based on fringe reflection is proposed to measure the optical axis of an aspheric mirror precisely and flexibly. In the measurement, a screen displaying a fringe pattern is moved along its normal direction, and a camera is located beside and observes the fringe pattern reflected via a tested surface. This method can test the optical axis of an aspheric mirror quantitatively before measuring the absolute hEight of the tested surface. And it can be combined with some presented methods that need to fit the aspheric mirror according to the optical axis to measure the surface. To validate the ability of this method, it is combined with one of the presented methods to measure absolute hEight of an aspheric mirror precisely and flexibly. Computer simulations and preliminary experiment validate the feasibility of this method. (C) 2011 Optical Society of America
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7245
Collection微电子装备总体研究室(四室)
Corresponding AuthorTang Y (Tang Yan)
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Tang Yan,Su Xianyu,Hu Song,et al. Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly[J]. APPLIED OPTICS,2011,50(31):5944-5948.
APA Tang Yan,Su Xianyu,Hu Song,&Tang Y .(2011).Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly.APPLIED OPTICS,50(31),5944-5948.
MLA Tang Yan,et al."Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly".APPLIED OPTICS 50.31(2011):5944-5948.
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