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纳米检焦中双相锁相放大器的Simulink建模与仿真
谢飞; 唐小萍; 胡松; 严伟
Source Publication光子学报
Volume39Issue:3Pages:397-402
2010
Language中文
Subtype期刊论文
Abstract基于半导体激光器的光反馈效应,提出了光反馈光腔衰荡技术用于测量腔镜的高反射率。相对于没有光反馈的情况,光腔衰荡信号振幅提高了两个数量级,从而大大提高了高反射率测量精度。在四个衰荡腔长采用光反馈光腔衰荡技术测量得到的腔镜反射率非常一致,统计平均值为99.9356±0.0008%。通过实验比较了光反馈光腔衰荡和脉冲光腔衰荡技术。结果表明,光反馈光腔衰荡技术的测量精度比脉冲光腔衰荡技术高。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7241
Collection微电子装备总体研究室(四室)
Corresponding Author谢飞
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
谢飞,唐小萍,胡松,等. 纳米检焦中双相锁相放大器的Simulink建模与仿真[J]. 光子学报,2010,39(3):397-402.
APA 谢飞,唐小萍,胡松,&严伟.(2010).纳米检焦中双相锁相放大器的Simulink建模与仿真.光子学报,39(3),397-402.
MLA 谢飞,et al."纳米检焦中双相锁相放大器的Simulink建模与仿真".光子学报 39.3(2010):397-402.
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