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莫尔条纹分析及其在光刻对准中的应用
马平; 周绍林; 胡松; 徐文祥
Source Publication电子工业专用设备
Volume39Issue:4Pages:21-23
2010
Language中文
Subtype期刊论文
Abstract简要介绍了用于超大面积光刻设备汞灯光源控制系统的总体控制方案,重点阐述了该控制系统信号放大电路、灯室温度采样放大电路及信号反馈控制方法。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7240
Collection微电子装备总体研究室(四室)
Corresponding Author马平
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
马平,周绍林,胡松,等. 莫尔条纹分析及其在光刻对准中的应用[J]. 电子工业专用设备,2010,39(4):21-23.
APA 马平,周绍林,胡松,&徐文祥.(2010).莫尔条纹分析及其在光刻对准中的应用.电子工业专用设备,39(4),21-23.
MLA 马平,et al."莫尔条纹分析及其在光刻对准中的应用".电子工业专用设备 39.4(2010):21-23.
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