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干涉空间相位光刻对准方法研究
马平; 胡松; 周绍林; 徐文祥
Source Publication激光与红外
Volume40Issue:7Pages:748-751
2010
Language中文
Subtype期刊论文
Abstract分析讨论了光学系统热补偿设计的几种方式,并基于衍射光学元件特殊的热差特性,将衍射元件应用于非制冷红外双焦光学系统实现光学被动热补偿。ZEMAX光学设计软件分析结果表明,该系统在规定温度范围内成像良好,温度对双焦光学系统的影响不大。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7238
Collection微电子装备总体研究室(四室)
Corresponding Author马平
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
马平,胡松,周绍林,等. 干涉空间相位光刻对准方法研究[J]. 激光与红外,2010,40(7):748-751.
APA 马平,胡松,周绍林,&徐文祥.(2010).干涉空间相位光刻对准方法研究.激光与红外,40(7),748-751.
MLA 马平,et al."干涉空间相位光刻对准方法研究".激光与红外 40.7(2010):748-751.
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