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基于双光栅的纳米测量方法
周绍林; 杨勇; 陈旺富
Source Publication光学学报
Volume29Issue:3Pages:702-706
2009
Language中文
Indexed ByEi
Subtype期刊论文
Abstract针对两个物体或平面的相对位移和间隙的纳米级变化量,提出并研究了一种光栅测量方法.采用两组周期接近的微光栅重叠可以产生一组周期分布的条纹,条纹的周期相对于两光栅周期被大幅度放大,并将光栅间的位移反应在条纹的相
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7230
Collection微电子装备总体研究室(四室)
Corresponding Author周绍林
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
周绍林,杨勇,陈旺富. 基于双光栅的纳米测量方法[J]. 光学学报,2009,29(3):702-706.
APA 周绍林,杨勇,&陈旺富.(2009).基于双光栅的纳米测量方法.光学学报,29(3),702-706.
MLA 周绍林,et al."基于双光栅的纳米测量方法".光学学报 29.3(2009):702-706.
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