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球面投影光刻物镜的设计
赵立新; 张雨东; 王建; 戴云; 高洪涛; 董小春; 饶学军
Source Publication光电工程
Volume36Issue:1Pages:93-97
2009
Language中文
Subtype期刊论文
Abstract针对人工晶体或隐形眼镜的面形上连续浮雕结构加工的特点,本文介绍了基于空间光调制器(DMD)曲面投影光刻物镜系统的设计方法.根据其成像面为曲面的特点,根据光学设计理论多次利用弯向物方的弯月形负透镜结构进行场曲校正
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7229
Collection微电子装备总体研究室(四室)
Corresponding Author赵立新
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
赵立新,张雨东,王建,等. 球面投影光刻物镜的设计[J]. 光电工程,2009,36(1):93-97.
APA 赵立新.,张雨东.,王建.,戴云.,高洪涛.,...&饶学军.(2009).球面投影光刻物镜的设计.光电工程,36(1),93-97.
MLA 赵立新,et al."球面投影光刻物镜的设计".光电工程 36.1(2009):93-97.
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