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微悬臂梁阵列成像系统光学特性分析
严伟; 佟军民; 陈大鹏; 胡松; 赵立新; 杨勇[; 蒋文波; 周绍林; 陈旺富
Source Publication四川大学学报
Volume46Issue:4Pages:988-992
2009
Language中文
Subtype期刊论文
Abstract光学读出式红外成像系统是近年来提出的一种新型红外成像技术,该技术是基于探测双材料微悬臂梁吸收红外辐射后的变形量.这种红外光学成像系统由微悬臂梁阵列和光学读出设备组成,在本文中,将首先论述其系统结构和成像原理
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7225
Collection微电子装备总体研究室(四室)
Corresponding Author严伟
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
严伟,佟军民,陈大鹏,等. 微悬臂梁阵列成像系统光学特性分析[J]. 四川大学学报,2009,46(4):988-992.
APA 严伟.,佟军民.,陈大鹏.,胡松.,赵立新.,...&陈旺富.(2009).微悬臂梁阵列成像系统光学特性分析.四川大学学报,46(4),988-992.
MLA 严伟,et al."微悬臂梁阵列成像系统光学特性分析".四川大学学报 46.4(2009):988-992.
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