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基于旋转法的干涉仪系统误差标定
张建峰; 曹学东; 景洪伟; 吴时彬; 阴 旭
Source Publication光电工程
Volume38Issue:12Pages:144-150
2011
Language中文
Subtype期刊论文
Abstract针对干涉仪高精度检测的需求,本文提出了旋转法标定干涉仪系统误差,实现绝对检测,从而提高检测精度。该方法根据Zernike多项式的性质,可以通过N次平分旋转和一次旋转法两种方法实现。本文对这两种方法分别做了详细的理论推导,并且给出具体实验结果与误差分析。实验结果表明,两种方法的测量结果基本一致,差值的PV值为0.006 λ,RMS值为0.001 λ。误差分析结果表明,一次旋转法的旋转误差小于N次平分法,因此一次旋转法是一种精度更高的方法。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7060
Collection质量处(质检中心)
Corresponding Author张建峰
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
张建峰,曹学东,景洪伟,等. 基于旋转法的干涉仪系统误差标定[J]. 光电工程,2011,38(12):144-150.
APA 张建峰,曹学东,景洪伟,吴时彬,&阴 旭.(2011).基于旋转法的干涉仪系统误差标定.光电工程,38(12),144-150.
MLA 张建峰,et al."基于旋转法的干涉仪系统误差标定".光电工程 38.12(2011):144-150.
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