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基于光栅多缝衍射的转角法测量微透镜焦距
朱咸昌; 曹学东; 吴时彬; 张鹏
Source Publication光学学报
Volume31Issue:5Pages:213-217
2011
Language中文
Subtype期刊论文
Abstract介绍了一种利用光栅的多缝衍射分光代替传统转角法的角度测量的微透镜焦距测量方法。平行光入射通过光栅后,由于光栅的衍射效应,在光栅后面将形成各级衍射光。通过测量光栅多缝衍射的±1级光斑和0级光斑的中心距,且由于光栅多缝衍射原理±1级和0级衍射光间的转角由光栅周期和测量光源的波长决定,可通过转角法测量焦距原理完成对微透镜焦距的测量。由于转角由系统参数决定,同时利用图像清晰度函数对光斑进行定焦,分析实验结果表明该方法用于微透镜焦距测量具有较高的测量精度。由于该方法具有较高的测量效率和测量精度,同时可用于阵列数较多的...
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7059
Collection质量处(质检中心)
Corresponding Author朱咸昌
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
朱咸昌,曹学东,吴时彬,等. 基于光栅多缝衍射的转角法测量微透镜焦距[J]. 光学学报,2011,31(5):213-217.
APA 朱咸昌,曹学东,吴时彬,&张鹏.(2011).基于光栅多缝衍射的转角法测量微透镜焦距.光学学报,31(5),213-217.
MLA 朱咸昌,et al."基于光栅多缝衍射的转角法测量微透镜焦距".光学学报 31.5(2011):213-217.
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