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Measurement of influence function using swing arm profilometer and laser tracker
Hongwei Jing; King C.; Walker D.
Source PublicationOptics Express
Volume5Issue:5Pages:5271-81
2010
Language英语
Subtype期刊论文
AbstractWe present a novel method to accurately measure 3D polishing influence functions by using a swing arm profilometer (SAP) and a laser tracker. The laser tracker is used to align the SAP and measure the parameters of the SAP setup before measuring the influence function. The instruments and the measurement method are described, together with measurement uncertainty analysis. An influence function deliberately produced with asymmetric form in order to create a challenging test is measured, and compared with that of a commercial 3D profilometer. The SAP result is 48.2 mu m in PV, 7.271 mm/sup 3/ in volume. The 3D profilometer result is 48.4 mu m in PV, 7.289 mm/sup 3/ in volume. The forms of the two results show excellent correlation. This gives confidence of the viability of the SAP method for larger influence functions out of range of the commercial instrument.; We present a novel method to accurately measure 3D polishing influence functions by using a swing arm profilometer (SAP) and a laser tracker. The laser tracker is used to align the SAP and measure the parameters of the SAP setup before measuring the influence function. The instruments and the measurement method are described, together with measurement uncertainty analysis. An influence function deliberately produced with asymmetric form in order to create a challenging test is measured, and compared with that of a commercial 3D profilometer. The SAP result is 48.2 mu m in PV, 7.271 mm/sup 3/ in volume. The 3D profilometer result is 48.4 mu m in PV, 7.289 mm/sup 3/ in volume. The forms of the two results show excellent correlation. This gives confidence of the viability of the SAP method for larger influence functions out of range of the commercial instrument.
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7053
Collection质量处(质检中心)
Corresponding AuthorHongwei Jing
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Hongwei Jing,King C.,Walker D.. Measurement of influence function using swing arm profilometer and laser tracker[J]. Optics Express,2010,5(5):5271-81.
APA Hongwei Jing,King C.,&Walker D..(2010).Measurement of influence function using swing arm profilometer and laser tracker.Optics Express,5(5),5271-81.
MLA Hongwei Jing,et al."Measurement of influence function using swing arm profilometer and laser tracker".Optics Express 5.5(2010):5271-81.
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