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大口径光学镜研磨阶段面形检测技术研究
李杰; 吴时彬; 伍凡; 匡龙; 曹学东
Source Publication红外与激光工程
Volume38Issue:Z
2009
Language中文
Subtype期刊论文
Abstract介绍了一种大口径光学镜面粗、精磨阶段的面形检测方法以解决目前日益增大的望远镜主镜在加工检测中存在的难题。利用激光跟踪仪对镜面面形进行检测,分析了激光跟踪仪系统误差及环境误差对测量带来的影响,确定了正确的测量方式,提出了利用小口径标准镜进行跟踪仪系统误差校正、设置参考点对环境误差给予补偿及运用Zernike多项式进行测量数据处理从而提升测量精度的方法,初步实验表明,该方法具有所需的精度,提升了镜面加工检测效率。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7051
Collection质量处(质检中心)
Corresponding Author李杰
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
李杰,吴时彬,伍凡,等. 大口径光学镜研磨阶段面形检测技术研究[J]. 红外与激光工程,2009,38(Z).
APA 李杰,吴时彬,伍凡,匡龙,&曹学东.(2009).大口径光学镜研磨阶段面形检测技术研究.红外与激光工程,38(Z).
MLA 李杰,et al."大口径光学镜研磨阶段面形检测技术研究".红外与激光工程 38.Z(2009).
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