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题名:
Phase shifting interferometry from two normalized interferograms with random tilt phase-shift
作者: Liu, Fengwei1,2; Wu, Yongqian1; Wu, Fan1
刊名: Optics Express
出版日期: 2015
卷号: 23, 期号:15, 页码:19932-19946
学科分类: Interferometry - Iterative methods - Phase shifters
DOI: 10.1364/OE.23.019932
文章类型: 期刊论文
中文摘要: We propose a novel phase shifting interferometry from two normalized interferograms with random tilt phase-shift. The determination of tilt phase-shift is performed by extracting the tilted phase-shift plane from the phase difference of two normalized interferograms, and with the calculated tilt phase-shift value the phase distribution can be retrieved from the two normalized frames. By analyzing the distribution of phase difference and utilizing special points fitting method, the tilted phase-shift plane is extracted in three different cases, which relate to different magnitudes of tilts. Proposed method has been applied to simulations and experiments successfully and the satisfactory results manifest that proposed method is of high accuracy and high speed compared with the three step iterative method. Additionally, both open and closed fringe can be analyzed with proposed method. What's more, it cannot only eliminate the small tiltshift error caused by slight vibration in phase-shifting interferometry, but also detect the large tilt phase-shift in phase-tilting interferometry. Thus, it will relaxes the requirements on the accuracy of phase shifter, and the costly phase shifter may even be useless by applying proposed method in high amplitude vibrated circumstance to achieve high-precision analysis. © 2015 Optical Society of America.
英文摘要: We propose a novel phase shifting interferometry from two normalized interferograms with random tilt phase-shift. The determination of tilt phase-shift is performed by extracting the tilted phase-shift plane from the phase difference of two normalized interferograms, and with the calculated tilt phase-shift value the phase distribution can be retrieved from the two normalized frames. By analyzing the distribution of phase difference and utilizing special points fitting method, the tilted phase-shift plane is extracted in three different cases, which relate to different magnitudes of tilts. Proposed method has been applied to simulations and experiments successfully and the satisfactory results manifest that proposed method is of high accuracy and high speed compared with the three step iterative method. Additionally, both open and closed fringe can be analyzed with proposed method. What's more, it cannot only eliminate the small tiltshift error caused by slight vibration in phase-shifting interferometry, but also detect the large tilt phase-shift in phase-tilting interferometry. Thus, it will relaxes the requirements on the accuracy of phase shifter, and the costly phase shifter may even be useless by applying proposed method in high amplitude vibrated circumstance to achieve high-precision analysis. © 2015 Optical Society of America.
收录类别: SCI ; Ei
项目资助者: National Natural Science Foundation of China [61108044] ; Creative Foundation of Institute of Optics and Electronics, CAS
语种: 英语
WOS记录号: WOS:000361035300133
ISSN号: 1094-4086
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7049
Appears in Collections:先光中心_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China
2. University of Chinese Academy of Sciences, Beijing, China

Recommended Citation:
Liu, Fengwei,Wu, Yongqian,Wu, Fan. Phase shifting interferometry from two normalized interferograms with random tilt phase-shift[J]. Optics Express,2015,23(15):19932-19946.
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