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Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology
Liu, Fengwei; Wu, Yongqian; Wu, Fan; Liu, FW (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China.
Source PublicationOptics Express
Volume23Issue:8Pages:10794-10807
2015
Language英语
ISSN1094-4087
DOI10.1364/OE.23.010794
Indexed BySCI ; Ei
WOS IDWOS:000353299300125
Subtype期刊论文
AbstractThe accuracy of phase-shifting interferometers (PSI) is crippled by nonlinearity of the phase shifter and instability of the environment such as vibration and air turbulence. A general algorithm, utilizing Lissajous figures and ellipse fitting, of correcting the phase extraction error in the phase shifting interferometry is described in this paper. By plotting N against D, where N and D represent the numerator and denominator terms of the phase extraction function (i.e. an arctangent function) respectively, a Lissajous ellipse is created. Once the parameters of the ellipse are determined by ellipse fitting, one can transform the ellipse to a unit circle (ETC). Through this process the phase extraction error caused by random phase shift errors can be corrected successfully. Proposed method is noniterated, adapts to all phase shifting algorithms (PSAs), and has high accuracy. Some factors that may affect the performance of proposed method are discussed in numerical simulations. Optical experiments are implemented to validate the effectiveness of proposed algorithm. (C)2015 Optical Society of America; The accuracy of phase-shifting interferometers (PSI) is crippled by nonlinearity of the phase shifter and instability of the environment such as vibration and air turbulence. A general algorithm, utilizing Lissajous figures and ellipse fitting, of correcting the phase extraction error in the phase shifting interferometry is described in this paper. By plotting N against D, where N and D represent the numerator and denominator terms of the phase extraction function (i.e. an arctangent function) respectively, a Lissajous ellipse is created. Once the parameters of the ellipse are determined by ellipse fitting, one can transform the ellipse to a unit circle (ETC). Through this process the phase extraction error caused by random phase shift errors can be corrected successfully. Proposed method is noniterated, adapts to all phase shifting algorithms (PSAs), and has high accuracy. Some factors that may affect the performance of proposed method are discussed in numerical simulations. Optical experiments are implemented to validate the effectiveness of proposed algorithm. (C)2015 Optical Society of America
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7046
Collection先光中心
Corresponding AuthorLiu, FW (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China.
Affiliation1.[Liu, Fengwei
2.Wu, Yongqian
3.Wu, Fan] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
4.[Liu, Fengwei] Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Liu, Fengwei,Wu, Yongqian,Wu, Fan,et al. Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology[J]. Optics Express,2015,23(8):10794-10807.
APA Liu, Fengwei,Wu, Yongqian,Wu, Fan,&Liu, FW .(2015).Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology.Optics Express,23(8),10794-10807.
MLA Liu, Fengwei,et al."Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology".Optics Express 23.8(2015):10794-10807.
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