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题名:
Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology
作者: Liu, Fengwei; Wu, Yongqian; Wu, Fan
刊名: Optics Express
出版日期: 2015
卷号: 23, 期号:8, 页码:10794-10807
DOI: 10.1364/OE.23.010794
通讯作者: Liu, FW (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China.
文章类型: 期刊论文
中文摘要: The accuracy of phase-shifting interferometers (PSI) is crippled by nonlinearity of the phase shifter and instability of the environment such as vibration and air turbulence. A general algorithm, utilizing Lissajous figures and ellipse fitting, of correcting the phase extraction error in the phase shifting interferometry is described in this paper. By plotting N against D, where N and D represent the numerator and denominator terms of the phase extraction function (i.e. an arctangent function) respectively, a Lissajous ellipse is created. Once the parameters of the ellipse are determined by ellipse fitting, one can transform the ellipse to a unit circle (ETC). Through this process the phase extraction error caused by random phase shift errors can be corrected successfully. Proposed method is noniterated, adapts to all phase shifting algorithms (PSAs), and has high accuracy. Some factors that may affect the performance of proposed method are discussed in numerical simulations. Optical experiments are implemented to validate the effectiveness of proposed algorithm. (C)2015 Optical Society of America
英文摘要: The accuracy of phase-shifting interferometers (PSI) is crippled by nonlinearity of the phase shifter and instability of the environment such as vibration and air turbulence. A general algorithm, utilizing Lissajous figures and ellipse fitting, of correcting the phase extraction error in the phase shifting interferometry is described in this paper. By plotting N against D, where N and D represent the numerator and denominator terms of the phase extraction function (i.e. an arctangent function) respectively, a Lissajous ellipse is created. Once the parameters of the ellipse are determined by ellipse fitting, one can transform the ellipse to a unit circle (ETC). Through this process the phase extraction error caused by random phase shift errors can be corrected successfully. Proposed method is noniterated, adapts to all phase shifting algorithms (PSAs), and has high accuracy. Some factors that may affect the performance of proposed method are discussed in numerical simulations. Optical experiments are implemented to validate the effectiveness of proposed algorithm. (C)2015 Optical Society of America
收录类别: SCI ; Ei
项目资助者: National Natural Science Foundation of China [61108045]
语种: 英语
WOS记录号: WOS:000353299300125
ISSN号: 1094-4087
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7046
Appears in Collections:先光中心_期刊论文

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作者单位: 1.[Liu, Fengwei
2.Wu, Yongqian
3.Wu, Fan] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China
4.[Liu, Fengwei] Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Liu, Fengwei,Wu, Yongqian,Wu, Fan. Correction of phase extraction error in phase-shifting interferometry based on Lissajous figure and ellipse fitting technology[J]. Optics Express,2015,23(8):10794-10807.
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