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The effects of thermal field on radius of curvature interferometric testing
Jie, Mao; Xi, Hou; Fan, Wu; Jie, M (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
Source PublicationOPTICAL REVIEW
Volume22Issue:2Pages:299-307
2015
Language英语
ISSN1340-6000
DOI10.1007/s10043-015-0071-z
Indexed BySCI
WOS IDWOS:000353630800013
Subtype期刊论文
AbstractIn high accuracy radius of curvature (ROC) measurement, discrepancy may exist in results on the same optical surface under different temperature. In this paper, the effects of temperature on ROC are analyzed systematically including system error of interferometry and thermal self-deformation of spherical optical elements. The self-deformation is simulated by finite element analysis method and experiments are carried out on a set of elements with different ROC, repeatedly measured by interferometry. The result shows that the effects of thermal field on ROC augment with the increasing of radius of measured surface and that the experimental results show consistency with the theoretical analysis, thus demonstrating that the effects on ROC can be estimated and compensated under different temperature variation.; In high accuracy radius of curvature (ROC) measurement, discrepancy may exist in results on the same optical surface under different temperature. In this paper, the effects of temperature on ROC are analyzed systematically including system error of interferometry and thermal self-deformation of spherical optical elements. The self-deformation is simulated by finite element analysis method and experiments are carried out on a set of elements with different ROC, repeatedly measured by interferometry. The result shows that the effects of thermal field on ROC augment with the increasing of radius of measured surface and that the experimental results show consistency with the theoretical analysis, thus demonstrating that the effects on ROC can be estimated and compensated under different temperature variation.
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Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7044
Collection先光中心
Corresponding AuthorJie, M (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
Affiliation1.[Jie, Mao
2.Xi, Hou
3.Fan, Wu] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
4.[Jie, Mao] Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Jie, Mao,Xi, Hou,Fan, Wu,et al. The effects of thermal field on radius of curvature interferometric testing[J]. OPTICAL REVIEW,2015,22(2):299-307.
APA Jie, Mao,Xi, Hou,Fan, Wu,&Jie, M .(2015).The effects of thermal field on radius of curvature interferometric testing.OPTICAL REVIEW,22(2),299-307.
MLA Jie, Mao,et al."The effects of thermal field on radius of curvature interferometric testing".OPTICAL REVIEW 22.2(2015):299-307.
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