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题名:
Surface accuracy analysis of active stressed lap based on structure function
作者: Zhao, Hongshen; Fan, Bin; Li, Xiaojin; Zeng, Zhige
刊名: OPTICAL REVIEW
出版日期: 2015
卷号: 22, 期号:1, 页码:52-57
学科分类: Structure function; Active stressed lap; Big mirror processing; Surface representation
DOI: 10.1007/s10043-015-0051-3
通讯作者: Zhao, HS (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
文章类型: 期刊论文
中文摘要: In grinding and polishing of big mirrors using active stressed lap, lap surface accuracy restricts mirror accuracy and processing efficiency chiefly. Lap surface error, which is the mismatch between the mirror and the lap, causes partial pressure concentration and poor efficiency in grinding or polishing. Different from surface representation of active stressed lap using PV and RMS, structure function could describe average variance over all regions on lap in a given separation. This paper illustrates an efficient technique for representing active stressed lap surface error using structure function and relating bending model to the representation. Example of this procedure is described and results show that this method could represent lap surface exactly; meanwhile the surface accuracy after compensating residual error caused by lap sag could achieve allowable error specification for big mirror manufacturing.
英文摘要: In grinding and polishing of big mirrors using active stressed lap, lap surface accuracy restricts mirror accuracy and processing efficiency chiefly. Lap surface error, which is the mismatch between the mirror and the lap, causes partial pressure concentration and poor efficiency in grinding or polishing. Different from surface representation of active stressed lap using PV and RMS, structure function could describe average variance over all regions on lap in a given separation. This paper illustrates an efficient technique for representing active stressed lap surface error using structure function and relating bending model to the representation. Example of this procedure is described and results show that this method could represent lap surface exactly; meanwhile the surface accuracy after compensating residual error caused by lap sag could achieve allowable error specification for big mirror manufacturing.
收录类别: SCI
项目资助者: National 863 Funds of China
语种: 英语
WOS记录号: WOS:000353630200008
ISSN号: 1340-6000
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7043
Appears in Collections:先光中心_期刊论文

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作者单位: 1.[Zhao, Hongshen
2.Fan, Bin
3.Li, Xiaojin
4.Zeng, Zhige] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
5.[Zhao, Hongshen] Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Zhao, Hongshen,Fan, Bin,Li, Xiaojin,et al. Surface accuracy analysis of active stressed lap based on structure function[J]. OPTICAL REVIEW,2015,22(1):52-57.
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