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Surface accuracy analysis of active stressed lap based on structure function
Zhao, Hongshen; Fan, Bin; Li, Xiaojin; Zeng, Zhige; Zhao, HS (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
Source PublicationOPTICAL REVIEW
Volume22Issue:1Pages:52-57
2015
Language英语
ISSN1340-6000
DOI10.1007/s10043-015-0051-3
Indexed BySCI
WOS IDWOS:000353630200008
Subtype期刊论文
AbstractIn grinding and polishing of big mirrors using active stressed lap, lap surface accuracy restricts mirror accuracy and processing efficiency chiefly. Lap surface error, which is the mismatch between the mirror and the lap, causes partial pressure concentration and poor efficiency in grinding or polishing. Different from surface representation of active stressed lap using PV and RMS, structure function could describe average variance over all regions on lap in a given separation. This paper illustrates an efficient technique for representing active stressed lap surface error using structure function and relating bending model to the representation. Example of this procedure is described and results show that this method could represent lap surface exactly; meanwhile the surface accuracy after compensating residual error caused by lap sag could achieve allowable error specification for big mirror manufacturing.; In grinding and polishing of big mirrors using active stressed lap, lap surface accuracy restricts mirror accuracy and processing efficiency chiefly. Lap surface error, which is the mismatch between the mirror and the lap, causes partial pressure concentration and poor efficiency in grinding or polishing. Different from surface representation of active stressed lap using PV and RMS, structure function could describe average variance over all regions on lap in a given separation. This paper illustrates an efficient technique for representing active stressed lap surface error using structure function and relating bending model to the representation. Example of this procedure is described and results show that this method could represent lap surface exactly; meanwhile the surface accuracy after compensating residual error caused by lap sag could achieve allowable error specification for big mirror manufacturing.
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Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7043
Collection先光中心
Corresponding AuthorZhao, HS (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
Affiliation1.[Zhao, Hongshen
2.Fan, Bin
3.Li, Xiaojin
4.Zeng, Zhige] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
5.[Zhao, Hongshen] Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Zhao, Hongshen,Fan, Bin,Li, Xiaojin,et al. Surface accuracy analysis of active stressed lap based on structure function[J]. OPTICAL REVIEW,2015,22(1):52-57.
APA Zhao, Hongshen,Fan, Bin,Li, Xiaojin,Zeng, Zhige,&Zhao, HS .(2015).Surface accuracy analysis of active stressed lap based on structure function.OPTICAL REVIEW,22(1),52-57.
MLA Zhao, Hongshen,et al."Surface accuracy analysis of active stressed lap based on structure function".OPTICAL REVIEW 22.1(2015):52-57.
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