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题名:
Aspheric surface reconstruction for scanning interference
作者: Li, Lulu1,2,3; Zhao, Wenchuan1; Wu, Fan1; Liu, Yong2; Fan, Bin1
刊名: Optik
出版日期: 2014
卷号: 125, 期号:11, 页码:2587-2591
学科分类: Interferometry - Iterative methods - Scanning - Surface reconstruction
DOI: 10.1016/j.ijleo.2013.11.014
通讯作者: Zhao, W. (zhaowc168-98@163.com)
文章类型: 期刊论文
中文摘要: A simplified reconstructing method for the aspheric surface testing based on scanning interference technology is presented. The aspheric normal intersects the optical axis at different points with different angles, which is called normal congruence; a normal congruence can identify an aspheric surface. In this method, the test aspheric surface is shifted along the optical axis to scan the tested aspheric surface; meanwhile a series of interferograms and phase maps are obtained. The angles between the normal lines and the aspheric axis are obtained using the positions of zero-phase points, according to the image-forming principle of the camera. Here, Zernike polynomials are applied to analyze the phase maps and extract the zero-phase points. Finally, the absolute coordinates of the test surface is rebuilt through iterative integration. Because both the system deformation and amplification do not affect the reconstruction result, this method can avoid complicated stitching algorithm in the subaperture stitching interferometric method. Experimental results show that the method has high accuracy and reliability. © 2014 Elsevier GmbH. All rights reserved.
英文摘要: A simplified reconstructing method for the aspheric surface testing based on scanning interference technology is presented. The aspheric normal intersects the optical axis at different points with different angles, which is called normal congruence; a normal congruence can identify an aspheric surface. In this method, the test aspheric surface is shifted along the optical axis to scan the tested aspheric surface; meanwhile a series of interferograms and phase maps are obtained. The angles between the normal lines and the aspheric axis are obtained using the positions of zero-phase points, according to the image-forming principle of the camera. Here, Zernike polynomials are applied to analyze the phase maps and extract the zero-phase points. Finally, the absolute coordinates of the test surface is rebuilt through iterative integration. Because both the system deformation and amplification do not affect the reconstruction result, this method can avoid complicated stitching algorithm in the subaperture stitching interferometric method. Experimental results show that the method has high accuracy and reliability. © 2014 Elsevier GmbH. All rights reserved.
收录类别: SCI ; Ei
项目资助者: National Natural Science Foundation of China [60838002]
语种: 英语
WOS记录号: WOS:000337118300025
ISSN号: 00304026
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7037
Appears in Collections:先光中心_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China
3. University of Chinese Academy of Sciences, Beijing 100049, China

Recommended Citation:
Li, Lulu,Zhao, Wenchuan,Wu, Fan,et al. Aspheric surface reconstruction for scanning interference[J]. Optik,2014,125(11):2587-2591.
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