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Edge effect modeling and experiments on active lap processing
Liu, Haitao1,2; Wu, Fan2; Zeng, Zhige2; Fan, Bin2; Wan, Yongjian2
Source PublicationOptics Express
Volume22Issue:9Pages:10761-10774
2014
Language英语
DOI10.1364/OE.22.010761
Indexed BySCI ; Ei
WOS IDWOS:000335905300105
Subtype期刊论文
AbstractEdge effect is regarded as one of the most difficult technical issues for fabricating large primary mirrors, especially for large polishing tools. Computer controlled active lap (CCAL) uses a large size pad (e.g., 1/3 to 1/5 workpiece diameters) to grind and polish the primary mirror. Edge effect also exists in the CCAL process in our previous fabrication. In this paper the material removal rules when edge effects happen (i.e. edge tool influence functions (TIFs)) are obtained through experiments, which are carried out on a F1090-mm circular flat mirror with a 375-mm-diameter lap. Two methods are proposed to model the edge TIFs for CCAL. One is adopting the pressure distribution which is calculated based on the finite element analysis method. The other is building up a parametric equivalent pressure model to fit the removed material curve directly. Experimental results show that these two methods both effectively model the edge TIF of CCAL. © 2014 Optical Society of America.; Edge effect is regarded as one of the most difficult technical issues for fabricating large primary mirrors, especially for large polishing tools. Computer controlled active lap (CCAL) uses a large size pad (e.g., 1/3 to 1/5 workpiece diameters) to grind and polish the primary mirror. Edge effect also exists in the CCAL process in our previous fabrication. In this paper the material removal rules when edge effects happen (i.e. edge tool influence functions (TIFs)) are obtained through experiments, which are carried out on a F1090-mm circular flat mirror with a 375-mm-diameter lap. Two methods are proposed to model the edge TIFs for CCAL. One is adopting the pressure distribution which is calculated based on the finite element analysis method. The other is building up a parametric equivalent pressure model to fit the removed material curve directly. Experimental results show that these two methods both effectively model the edge TIF of CCAL. © 2014 Optical Society of America.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7035
Collection先光中心
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Liu, Haitao,Wu, Fan,Zeng, Zhige,et al. Edge effect modeling and experiments on active lap processing[J]. Optics Express,2014,22(9):10761-10774.
APA Liu, Haitao,Wu, Fan,Zeng, Zhige,Fan, Bin,&Wan, Yongjian.(2014).Edge effect modeling and experiments on active lap processing.Optics Express,22(9),10761-10774.
MLA Liu, Haitao,et al."Edge effect modeling and experiments on active lap processing".Optics Express 22.9(2014):10761-10774.
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