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Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method
Song, Weihong1,2; Li, Shifang1; Hou, Xi1; Wu, Fan1; Zhao, Wenchuan1; Wan, Yongjian1; Song, W. (songscu@163.com)
Source PublicationOptics and Lasers in Engineering
Volume54Pages:49-54
2014
Language英语
ISSN01438166
DOI10.1016/j.optlaseng.2013.10.005
Indexed BySCI ; Ei
WOS IDWOS:000328720700008
Subtype期刊论文
AbstractWe present an absolute calibration method for Fizeau interferometer with global optimized shift-rotation, which requires rotational and translational measurements. With a data matching method to decrease the alignment error of rotations and translations, the accuracy can be guaranteed. The global optimized shift-rotation method can obtain the surface deviation accurately of both the reference and test surfaces in terms of Zernike polynomials. Experiments have been implemented to verify the validity of the absolute calibration, and the results show that the reference surface deviation agrees well with the calibration result of conventional two-sphere method. Simulations were performed to evaluate the errors introduced by rotations and translations. © 2013 Elsevier Ltd.; We present an absolute calibration method for Fizeau interferometer with global optimized shift-rotation, which requires rotational and translational measurements. With a data matching method to decrease the alignment error of rotations and translations, the accuracy can be guaranteed. The global optimized shift-rotation method can obtain the surface deviation accurately of both the reference and test surfaces in terms of Zernike polynomials. Experiments have been implemented to verify the validity of the absolute calibration, and the results show that the reference surface deviation agrees well with the calibration result of conventional two-sphere method. Simulations were performed to evaluate the errors introduced by rotations and translations. © 2013 Elsevier Ltd.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7033
Collection先光中心
Corresponding AuthorSong, W. (songscu@163.com)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Song, Weihong,Li, Shifang,Hou, Xi,et al. Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method[J]. Optics and Lasers in Engineering,2014,54:49-54.
APA Song, Weihong.,Li, Shifang.,Hou, Xi.,Wu, Fan.,Zhao, Wenchuan.,...&Song, W. .(2014).Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method.Optics and Lasers in Engineering,54,49-54.
MLA Song, Weihong,et al."Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method".Optics and Lasers in Engineering 54(2014):49-54.
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