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题名:
Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method
作者: Song, Weihong1,2; Li, Shifang1; Hou, Xi1; Wu, Fan1; Zhao, Wenchuan1; Wan, Yongjian1
刊名: Optics and Lasers in Engineering
出版日期: 2014
卷号: 54, 页码:49-54
学科分类: Calibration - Interferometry - Laser optics - Optimization - Surface measurement - Translation (languages)
DOI: 10.1016/j.optlaseng.2013.10.005
通讯作者: Song, W. (songscu@163.com)
文章类型: 期刊论文
中文摘要: We present an absolute calibration method for Fizeau interferometer with global optimized shift-rotation, which requires rotational and translational measurements. With a data matching method to decrease the alignment error of rotations and translations, the accuracy can be guaranteed. The global optimized shift-rotation method can obtain the surface deviation accurately of both the reference and test surfaces in terms of Zernike polynomials. Experiments have been implemented to verify the validity of the absolute calibration, and the results show that the reference surface deviation agrees well with the calibration result of conventional two-sphere method. Simulations were performed to evaluate the errors introduced by rotations and translations. © 2013 Elsevier Ltd.
英文摘要: We present an absolute calibration method for Fizeau interferometer with global optimized shift-rotation, which requires rotational and translational measurements. With a data matching method to decrease the alignment error of rotations and translations, the accuracy can be guaranteed. The global optimized shift-rotation method can obtain the surface deviation accurately of both the reference and test surfaces in terms of Zernike polynomials. Experiments have been implemented to verify the validity of the absolute calibration, and the results show that the reference surface deviation agrees well with the calibration result of conventional two-sphere method. Simulations were performed to evaluate the errors introduced by rotations and translations. © 2013 Elsevier Ltd.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000328720700008
ISSN号: 01438166
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7033
Appears in Collections:先光中心_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Song, Weihong,Li, Shifang,Hou, Xi,et al. Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method[J]. Optics and Lasers in Engineering,2014,54:49-54.
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