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Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution
Song, Weihong1,2; Hou, Xi1; Wu, Fan1; Wan, Yongjian1; Song, W. (songscu@163.com)
Source PublicationOptics and Lasers in Engineering
Volume54Pages:68-72
2014
Language英语
ISSN01438166
DOI10.1016/j.optlaseng.2013.10.015
Indexed BySCI ; Ei
WOS IDWOS:000328720700011
Subtype期刊论文
AbstractAbsolute interferometric testing method of shift-rotation in a Fizeau interferometer is effective in optical surface metrology with high accuracy and has been developed for decades. A pixel-level spatial frequency solution of interferometric shift-rotation method is presented in the manuscript. It requires a 90 rotational measurement and at least two translational measurements with different translations in the x and y directions besides a measurement at an original confocal position (0). With the well-organized absolute procedures, the absolute surface deviation of the test and reference surface can be obtained accurately with pixel-level spatial frequency resolution. As a result, the absolute results of the method contain much more mid-to high spatial frequency information and it is useful to directly detect the defects (dusts, pits) of the test and reference surfaces. No orthogonal polynomials fitting (such as Zernike polynomials) and interpolations are required in the calculation, and the absolute results can be guaranteed with high accuracy. Experimental absolute results of flat surfaces are given. © 2013 Elsevier Ltd.; Absolute interferometric testing method of shift-rotation in a Fizeau interferometer is effective in optical surface metrology with high accuracy and has been developed for decades. A pixel-level spatial frequency solution of interferometric shift-rotation method is presented in the manuscript. It requires a 90 rotational measurement and at least two translational measurements with different translations in the x and y directions besides a measurement at an original confocal position (0). With the well-organized absolute procedures, the absolute surface deviation of the test and reference surface can be obtained accurately with pixel-level spatial frequency resolution. As a result, the absolute results of the method contain much more mid-to high spatial frequency information and it is useful to directly detect the defects (dusts, pits) of the test and reference surfaces. No orthogonal polynomials fitting (such as Zernike polynomials) and interpolations are required in the calculation, and the absolute results can be guaranteed with high accuracy. Experimental absolute results of flat surfaces are given. © 2013 Elsevier Ltd.
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Cited Times:3[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7032
Collection先光中心
Corresponding AuthorSong, W. (songscu@163.com)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Song, Weihong,Hou, Xi,Wu, Fan,et al. Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution[J]. Optics and Lasers in Engineering,2014,54:68-72.
APA Song, Weihong,Hou, Xi,Wu, Fan,Wan, Yongjian,&Song, W. .(2014).Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution.Optics and Lasers in Engineering,54,68-72.
MLA Song, Weihong,et al."Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution".Optics and Lasers in Engineering 54(2014):68-72.
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