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题名:
A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process
作者: Wang, Jia; Fan, Bin; Wan, Yongjian; Shi, Chunyan; Zhuo, Bin
刊名: OPTICAL REVIEW
出版日期: 2014
卷号: 21, 期号:3, 页码:280-285
学科分类: CCOS process; power spectral density; convolution model; spatial frequency domain
DOI: 10.1007/s10043-014-0042-9
通讯作者: Wang, J (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
文章类型: 期刊论文
中文摘要: Quantitatively investigating error correction ability in frequency domain is important for computer controlled optical surfacing (CCOS) process to correct different spatial frequency errors. Based on the mathematical model coherence between filtering and material removal process of CCOS, a method is proposed to quantitatively evaluate the correction ability of CCOS process. A generalized model named normalized smoothing spectral function (SSF) will be established combine convolution model of CCOS and power spectral density (PSD) function. A set of polishing experiments are performed to calculate SSF curves and validate SSF model. By comparing the results of SSF curve with PSD curve and surface figure, it reveals that SSF curve can quantitatively indicate the correction ability of CCOS process for different spatial frequency errors. (C) 2014 The Japan Society of Applied Physics
英文摘要: Quantitatively investigating error correction ability in frequency domain is important for computer controlled optical surfacing (CCOS) process to correct different spatial frequency errors. Based on the mathematical model coherence between filtering and material removal process of CCOS, a method is proposed to quantitatively evaluate the correction ability of CCOS process. A generalized model named normalized smoothing spectral function (SSF) will be established combine convolution model of CCOS and power spectral density (PSD) function. A set of polishing experiments are performed to calculate SSF curves and validate SSF model. By comparing the results of SSF curve with PSD curve and surface figure, it reveals that SSF curve can quantitatively indicate the correction ability of CCOS process for different spatial frequency errors. (C) 2014 The Japan Society of Applied Physics
收录类别: SCI
项目资助者: National Natural Science Foundation of China (NSFC) [61378054]
语种: 英语
WOS记录号: WOS:000344640900015
ISSN号: 1340-6000
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7031
Appears in Collections:先光中心_期刊论文

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作者单位: 1.[Wang, Jia
2.Fan, Bin
3.Wan, Yongjian
4.Shi, Chunyan
5.Zhuo, Bin] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
6.[Wang, Jia] Univ Chinese Acad Sci, Beijing 100039, Peoples R China
7.[Wan, Yongjian] State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Wang, Jia,Fan, Bin,Wan, Yongjian,et al. A Method to Evaluate Error Correction Ability of Computer Controlled Optical Surfacing Process[J]. OPTICAL REVIEW,2014,21(3):280-285.
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