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题名:
Method to calculate the error correction ability of tool influence function in certain polishing conditions
作者: Wang, Jia1,2; Fan, Bin1; Wan, Yongjian1,3; Shi, Chunyan1; Zhuo, Bin1
刊名: Optical Engineering
出版日期: 2014
卷号: 53, 期号:7, 页码:075106
学科分类: Mathematical models - Method of moments - Polishing - Power spectral density
DOI: 10.1117/1.OE.53.7.075106
通讯作者: Wang, J. (wangj062778@qq.com)
文章类型: 期刊论文
中文摘要: Tool influence function (TIF) is quite important for computer-controlled optical surfacing (CCOS) technology. Quantitatively investigating the error correction ability of TIF in frequency domain is essential for CCOS to restrain different spatial frequency errors. The smoothing spectral function (SSF) is a newly proposed parameter to evaluate the error correction ability of CCOS process. Based on the SSF, a new method to calculate the error correction ability of TIF in certain polishing conditions will be proposed. The basic mathematical model for this method will be established in theory. A set of polishing experiments with rigid conformal (RC) tool are performed to calculate the error correction ability of TIF. The calculated results can quantitatively indicate the error correction ability of TIF for different spatial frequency errors in certain polishing conditions. © 2014 Society of Photo-Optical Instrumentation Engineers.
英文摘要: Tool influence function (TIF) is quite important for computer-controlled optical surfacing (CCOS) technology. Quantitatively investigating the error correction ability of TIF in frequency domain is essential for CCOS to restrain different spatial frequency errors. The smoothing spectral function (SSF) is a newly proposed parameter to evaluate the error correction ability of CCOS process. Based on the SSF, a new method to calculate the error correction ability of TIF in certain polishing conditions will be proposed. The basic mathematical model for this method will be established in theory. A set of polishing experiments with rigid conformal (RC) tool are performed to calculate the error correction ability of TIF. The calculated results can quantitatively indicate the error correction ability of TIF for different spatial frequency errors in certain polishing conditions. © 2014 Society of Photo-Optical Instrumentation Engineers.
收录类别: SCI ; Ei
项目资助者: National Natural Science Foundation of China (NSFC) [61378054]
语种: 英语
WOS记录号: WOS:000341183900046
ISSN号: 00913286
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7029
Appears in Collections:先光中心_期刊论文

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作者单位: 1. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China
3. State Key Laboratory of Optical Technology for Micro-fabrication, Chengdu 610209, China

Recommended Citation:
Wang, Jia,Fan, Bin,Wan, Yongjian,et al. Method to calculate the error correction ability of tool influence function in certain polishing conditions[J]. Optical Engineering,2014,53(7):075106.
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