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Method to calculate the error correction ability of tool influence function in certain polishing conditions
Wang, Jia1,2; Fan, Bin1; Wan, Yongjian1,3; Shi, Chunyan1; Zhuo, Bin1; Wang, J. (wangj062778@qq.com)
Source PublicationOptical Engineering
Volume53Issue:7Pages:075106
2014
Language英语
ISSN00913286
DOI10.1117/1.OE.53.7.075106
Indexed BySCI ; Ei
WOS IDWOS:000341183900046
Subtype期刊论文
AbstractTool influence function (TIF) is quite important for computer-controlled optical surfacing (CCOS) technology. Quantitatively investigating the error correction ability of TIF in frequency domain is essential for CCOS to restrain different spatial frequency errors. The smoothing spectral function (SSF) is a newly proposed parameter to evaluate the error correction ability of CCOS process. Based on the SSF, a new method to calculate the error correction ability of TIF in certain polishing conditions will be proposed. The basic mathematical model for this method will be established in theory. A set of polishing experiments with rigid conformal (RC) tool are performed to calculate the error correction ability of TIF. The calculated results can quantitatively indicate the error correction ability of TIF for different spatial frequency errors in certain polishing conditions. © 2014 Society of Photo-Optical Instrumentation Engineers.; Tool influence function (TIF) is quite important for computer-controlled optical surfacing (CCOS) technology. Quantitatively investigating the error correction ability of TIF in frequency domain is essential for CCOS to restrain different spatial frequency errors. The smoothing spectral function (SSF) is a newly proposed parameter to evaluate the error correction ability of CCOS process. Based on the SSF, a new method to calculate the error correction ability of TIF in certain polishing conditions will be proposed. The basic mathematical model for this method will be established in theory. A set of polishing experiments with rigid conformal (RC) tool are performed to calculate the error correction ability of TIF. The calculated results can quantitatively indicate the error correction ability of TIF for different spatial frequency errors in certain polishing conditions. © 2014 Society of Photo-Optical Instrumentation Engineers.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7029
Collection先光中心
Corresponding AuthorWang, J. (wangj062778@qq.com)
Affiliation1. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China
3. State Key Laboratory of Optical Technology for Micro-fabrication, Chengdu 610209, China
Recommended Citation
GB/T 7714
Wang, Jia,Fan, Bin,Wan, Yongjian,et al. Method to calculate the error correction ability of tool influence function in certain polishing conditions[J]. Optical Engineering,2014,53(7):075106.
APA Wang, Jia,Fan, Bin,Wan, Yongjian,Shi, Chunyan,Zhuo, Bin,&Wang, J. .(2014).Method to calculate the error correction ability of tool influence function in certain polishing conditions.Optical Engineering,53(7),075106.
MLA Wang, Jia,et al."Method to calculate the error correction ability of tool influence function in certain polishing conditions".Optical Engineering 53.7(2014):075106.
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