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题名:
Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method
作者: Yan, Fengtao1,2; Fan, Bin1; Hou, Xi1; Wu, Fan1
刊名: Optical Engineering
出版日期: 2013
卷号: 52, 期号:8, 页码:085101
学科分类: Mirrors
DOI: 10.1117/1.OE.52.8.085101
文章类型: 期刊论文
中文摘要: A method to obtain the absolute shape of a large plane or sphere surface in the subaperture testing with multiangle averaging and Zernike polynomial fitting method is proposed. The subaperture data obtained by the interferometer contain not only the test mirror deviation but also the reference surface deviation. The reference surface deviation has become the main limit of the subaperture testing accuracy. To correct the deviation, the measurements are made so that the reference deviation could be eliminated by rotational asymmetric deviation and the rotational symmetric deviation. This technique can get not only the full absolute shape of the large mirrors, but also the reference surface shape. Experimental results have been given to verify the effectiveness of this method. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE).
英文摘要: A method to obtain the absolute shape of a large plane or sphere surface in the subaperture testing with multiangle averaging and Zernike polynomial fitting method is proposed. The subaperture data obtained by the interferometer contain not only the test mirror deviation but also the reference surface deviation. The reference surface deviation has become the main limit of the subaperture testing accuracy. To correct the deviation, the measurements are made so that the reference deviation could be eliminated by rotational asymmetric deviation and the rotational symmetric deviation. This technique can get not only the full absolute shape of the large mirrors, but also the reference surface shape. Experimental results have been given to verify the effectiveness of this method. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE).
收录类别: SCI ; Ei
项目资助者: National Natural Science Foundation of China [60908042]
语种: 英语
WOS记录号: WOS:000324290900026
ISSN号: 00913286
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7022
Appears in Collections:先光中心_期刊论文

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作者单位: 1. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, China
2. University of Chinese, Academy of Sciences, Beijing, China

Recommended Citation:
Yan, Fengtao,Fan, Bin,Hou, Xi,et al. Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method[J]. Optical Engineering,2013,52(8):085101.
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