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Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method
Yan, Fengtao1,2; Fan, Bin1; Hou, Xi1; Wu, Fan1
Source PublicationOptical Engineering
Volume52Issue:8Pages:085101
2013
Language英语
ISSN00913286
DOI10.1117/1.OE.52.8.085101
Indexed BySCI ; Ei
WOS IDWOS:000324290900026
Subtype期刊论文
AbstractA method to obtain the absolute shape of a large plane or sphere surface in the subaperture testing with multiangle averaging and Zernike polynomial fitting method is proposed. The subaperture data obtained by the interferometer contain not only the test mirror deviation but also the reference surface deviation. The reference surface deviation has become the main limit of the subaperture testing accuracy. To correct the deviation, the measurements are made so that the reference deviation could be eliminated by rotational asymmetric deviation and the rotational symmetric deviation. This technique can get not only the full absolute shape of the large mirrors, but also the reference surface shape. Experimental results have been given to verify the effectiveness of this method. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE).; A method to obtain the absolute shape of a large plane or sphere surface in the subaperture testing with multiangle averaging and Zernike polynomial fitting method is proposed. The subaperture data obtained by the interferometer contain not only the test mirror deviation but also the reference surface deviation. The reference surface deviation has become the main limit of the subaperture testing accuracy. To correct the deviation, the measurements are made so that the reference deviation could be eliminated by rotational asymmetric deviation and the rotational symmetric deviation. This technique can get not only the full absolute shape of the large mirrors, but also the reference surface shape. Experimental results have been given to verify the effectiveness of this method. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE).
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7022
Collection先光中心
Affiliation1. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, China
2. University of Chinese, Academy of Sciences, Beijing, China
Recommended Citation
GB/T 7714
Yan, Fengtao,Fan, Bin,Hou, Xi,et al. Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method[J]. Optical Engineering,2013,52(8):085101.
APA Yan, Fengtao,Fan, Bin,Hou, Xi,&Wu, Fan.(2013).Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method.Optical Engineering,52(8),085101.
MLA Yan, Fengtao,et al."Absolute subaperture testing by multiangle averaging and Zernike polynomial fitting method".Optical Engineering 52.8(2013):085101.
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