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题名:
Absolute measurement of flats with the method of shift-rotation
作者: Song, Weihong; Wu, Fan; Hou, Xi; Zhao, Wenchuan; Wan, Yongjian
刊名: OPTICAL REVIEW
出版日期: 2013
卷号: 20, 期号:5, 页码:374-377
学科分类: absolute measurement; shift-rotation; interferometry; surface measurements
DOI: 10.1007/s10043-013-0067-5
通讯作者: Song, WH (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
文章类型: 期刊论文
中文摘要: We present an absolute measurement of flats in a Fizeau interferometer with the method of shift-rotation, which only requires rotational measurements and shift measurement with a translation. Experiments have been carried out to verify the validity of the absolute testing method, and the results show that the reference surface deviation measured with the shift-rotation method agrees well with that of another calibration result with traditional three-flat absolute procedure; the root-mean-square (RMS) of the residual figure between them is similar to 0.4 nm. (C) 2013 The Japan Society of Applied Physics
英文摘要: We present an absolute measurement of flats in a Fizeau interferometer with the method of shift-rotation, which only requires rotational measurements and shift measurement with a translation. Experiments have been carried out to verify the validity of the absolute testing method, and the results show that the reference surface deviation measured with the shift-rotation method agrees well with that of another calibration result with traditional three-flat absolute procedure; the root-mean-square (RMS) of the residual figure between them is similar to 0.4 nm. (C) 2013 The Japan Society of Applied Physics
收录类别: SCI
语种: 英语
WOS记录号: WOS:000325369000004
ISSN号: 1340-6000
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7021
Appears in Collections:先光中心_期刊论文

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作者单位: 1.[Song, Weihong
2.Hou, Xi
3.Zhao, Wenchuan
4.Wan, Yongjian] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
5.[Song, Weihong] Univ Chinese Acad Sci, Beijing 100039, Peoples R China

Recommended Citation:
Song, Weihong,Wu, Fan,Hou, Xi,et al. Absolute measurement of flats with the method of shift-rotation[J]. OPTICAL REVIEW,2013,20(5):374-377.
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