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Absolute measurement of flats with the method of shift-rotation
Song, Weihong; Wu, Fan; Hou, Xi; Zhao, Wenchuan; Wan, Yongjian; Song, WH (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
Source PublicationOPTICAL REVIEW
Volume20Issue:5Pages:374-377
2013
Language英语
ISSN1340-6000
DOI10.1007/s10043-013-0067-5
Indexed BySCI
WOS IDWOS:000325369000004
Subtype期刊论文
AbstractWe present an absolute measurement of flats in a Fizeau interferometer with the method of shift-rotation, which only requires rotational measurements and shift measurement with a translation. Experiments have been carried out to verify the validity of the absolute testing method, and the results show that the reference surface deviation measured with the shift-rotation method agrees well with that of another calibration result with traditional three-flat absolute procedure; the root-mean-square (RMS) of the residual figure between them is similar to 0.4 nm. (C) 2013 The Japan Society of Applied Physics; We present an absolute measurement of flats in a Fizeau interferometer with the method of shift-rotation, which only requires rotational measurements and shift measurement with a translation. Experiments have been carried out to verify the validity of the absolute testing method, and the results show that the reference surface deviation measured with the shift-rotation method agrees well with that of another calibration result with traditional three-flat absolute procedure; the root-mean-square (RMS) of the residual figure between them is similar to 0.4 nm. (C) 2013 The Japan Society of Applied Physics
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Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7021
Collection先光中心
Corresponding AuthorSong, WH (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China.
Affiliation1.[Song, Weihong
2.Hou, Xi
3.Zhao, Wenchuan
4.Wan, Yongjian] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
5.[Song, Weihong] Univ Chinese Acad Sci, Beijing 100039, Peoples R China
Recommended Citation
GB/T 7714
Song, Weihong,Wu, Fan,Hou, Xi,et al. Absolute measurement of flats with the method of shift-rotation[J]. OPTICAL REVIEW,2013,20(5):374-377.
APA Song, Weihong,Wu, Fan,Hou, Xi,Zhao, Wenchuan,Wan, Yongjian,&Song, WH .(2013).Absolute measurement of flats with the method of shift-rotation.OPTICAL REVIEW,20(5),374-377.
MLA Song, Weihong,et al."Absolute measurement of flats with the method of shift-rotation".OPTICAL REVIEW 20.5(2013):374-377.
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