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Nanofabrication with sub-50nm features by imprinting-induced cracks [会议论文]
Proceedings of SPIE: Optical Design and Testing VI, 2014
Xia, Liangping;  Zhang, Man;  Yang, Zheng;  Yin, Shaoyun;  Du, Chunlei
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Design the Diffractive Optical Element with Large Diffraction Angle [会议论文]
Proceedings of SPIE: HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VI, 2014
Pang, Hui;  Yin, Shaoyun;  Zheng, Guoxing;  Deng, Qiling;  Shi, Lifang;  Du, Chunlei
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Design and preparation of film for microsphere based optical super-resolution Imaging [会议论文]
Proceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS, 2014
Pang, Hui;  Du, Chunlei;  Qiu, Qi;  Yin, Shaoyun;  Zhang, Man;  Deng, Qiling
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Fabrication of resonant subwavelength grating based on thiol-ene [会议论文]
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
Zhang, Man;  Deng, Qiling;  Shi, Lifang;  Li, Zhiwei;  Pang, Hui;  Zhang, Yukun;  Yu, Jinqing;  Hu, Song
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Image processing of metal surface with structured light [会议论文]
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2014
Luo, Cong;  Feng, Chang;  Wang, Congzheng
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Integral imaging system with a soft substrate [会议论文]
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
Zhang, Yukun;  Du, Jinglei;  Pang, Hui;  Deng, Qiling;  Shi, Lifang;  Yin, Shaoyun;  Du, Chunlei;  Dong, Xiaochun;  Zhang, Zhiyou;  Zhang, Man;  Yu, Jinqing
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Design of a projection objective with high numeric aperture and large view field [会议论文]
Proceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS, 2014
Liu, Junbo;  Hu, Song;  Gao, Hongtao;  Zhao, Lixin;  Zhu, Xianchang
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Fabrication of nano-pillar with sub-100nm resolution based on thiol-ene [会议论文]
Proceedings of SPIE: NANOPHOTONICS AND MICRO/NANO OPTICS II, 2014
Zhang, Man;  Deng, Qiling;  Shi, Lifang;  Pang, Hui;  Cao, Axiu;  Hu, Song
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Intelligent control system based on ARM for lithography tool [会议论文]
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
Chen, Changlong;  Tang, Xiaoping;  Hu, Song;  Wang, Nan
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Optical super resolution technology and its application [会议论文]
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings, 2013
Nan, Wang;  Wei, Jiang;  Wei, Yan;  Song, Hu
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Fabrication of optical elements using a rapid UV-curable and low-viscosity polymer material [会议论文]
Proceedings of SPIE: Eighth International Symposium on Precision Engineering Measurements and Instrumentation, 2013
Zhang, Man;  Li, Zhiwei;  Dong, Xiaochun;  Shi, Lifang;  Deng, Qiling;  Du, Chunlei
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Iterative learning control for synchronization of reticle stage and wafer stage in step-and-scan lithographic equipment [会议论文]
Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications, 2013
Li, Lan-Lan;  Hu, Song;  Zhao, Li-Xin;  Ma, Ping
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The next generation microelectronics craft technique: Nanoimprint lithography [会议论文]
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings, 2013
Wei, Jiang;  Nan, Wang;  Wei, Yan;  Song, Hu;  Xiao-Qiong, Pu
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Design of infrared polarizer based on sub-wavelength metal wire grid [会议论文]
Proceedings of SPIE: Eighth International Symposium on Precision Engineering Measurements and Instrumentation, 2013
Guo, Wenrui;  Li, Zhiwei;  Gao, Hongtao;  Xia, Liangping;  Shi, Lifang;  Deng, Qiling;  Du, Chunlei
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A research of a high precision multi-channel data acquisition system [会议论文]
Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications, 2013
Zhong, Ling-Na;  Tang, Xiao-Ping;  Yan, Wei
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An algorithm for restoring the wafer surface based on B-spline surface reconstruction [会议论文]
Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications, 2013
Wang, Nan;  Jiang, Wei;  Yan, Wei;  Hu, Song
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Technology of focus detection for 193nm projection lithographic tool [会议论文]
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012
Di, Chengliang;  Yan, Wei;  Hu, Song;  Xu, Feng;  Li, Jinglong
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Maskless lithography alignment method based on phase-shifting Moiré fringes technique [会议论文]
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012
Zhu, Jiangping;  Hu, Song;  Yu, Junsheng;  Tang, Yan
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Using self-assembly technology to fabricate silver particle array for organic photovoltaic devices [会议论文]
Microelectronic Engineering, 2012
Hou, Yidong;  Li, Shuhong;  Ye, Song;  Shi, Sha;  Zhang, Maoguo;  Shi, Ruiying;  Du, Jinglei;  Du, Chunlei
  |  View/Download:1/0
 
Image process technique used in a large FOV compound eye imaging system [会议论文]
Proceedings of SPIE: Optoelectronic Imaging and Multimedia Technology II, 2012
Cao, Axiu;  Shi, Lifang;  Shi, Ruiying;  Deng, Qiling;  Du, Chunlei
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