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题名:
Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method
作者: Song, W.1,2; Hou, X.1; Wu, F.1; Wan, Y.1
刊名: Applied Optics
出版日期: 2013
卷号: 52, 期号:24, 页码:5974-5978
学科分类: Testing
DOI: 10.1364/AO.52.005974
通讯作者: Song, W. (songscu@163.com)
文章类型: 期刊论文
中文摘要: Absolute testing methods are commonly employed in surface metrology to calibrate the reference surface deviation and obtain the absolute deviation of the surface under test. A simple and reliable datareduction method of absolute shift-rotation method with rotational and translational measurements is presented here, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. The rotationally asymmetric surface deviation can be simply obtained by classical N-position averaging method. After that, the two-dimensional problem of estimating the other rotationally symmetric surface deviation can be simplified to a one-dimensional problem, and it can be directly calculated out with pixel-level spatial frequency based on several measurements of different translations in one same direction. Since that no orthogonal polynomials fitting, such as Zernike polynomials, is required in the calculation, the data reduction of the method is simple and rapid. Experimental absolute results of spherical surfaces are given. © 2013 Optical Society of America.
英文摘要: Absolute testing methods are commonly employed in surface metrology to calibrate the reference surface deviation and obtain the absolute deviation of the surface under test. A simple and reliable datareduction method of absolute shift-rotation method with rotational and translational measurements is presented here, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. The rotationally asymmetric surface deviation can be simply obtained by classical N-position averaging method. After that, the two-dimensional problem of estimating the other rotationally symmetric surface deviation can be simplified to a one-dimensional problem, and it can be directly calculated out with pixel-level spatial frequency based on several measurements of different translations in one same direction. Since that no orthogonal polynomials fitting, such as Zernike polynomials, is required in the calculation, the data reduction of the method is simple and rapid. Experimental absolute results of spherical surfaces are given. © 2013 Optical Society of America.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000323881400016
ISSN号: 1559128X
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7019
Appears in Collections:先光中心_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Song, W.,Hou, X.,Wu, F.,et al. Simple and rapid data-reduction method with pixel-level spatial frequency of shift-rotation method[J]. Applied Optics,2013,52(24):5974-5978.
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