题名: Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm
作者: Song, Weihong 1,2 ; Wu, Fan 1 ; Hou, Xi 1 ; Wu, Gaofeng 1,2 ; Liu, Bin 1 ; Wan, Yongjian 1
刊名: Optical Engineering
出版日期: 2013
卷号: 52, 期号: 3, 页码: 033601 学科分类: Algorithms - Interferometry - Iterative methods - Laser optics - Testing
DOI: 10.1117/1.OE.52.3.033601
文章类型: 期刊论文
中文摘要: We present an absolute testing of a spherical reference surface of a Fizeau interferometer with the method of shift-rotation, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. With a new procedure to measure the rotationally asymmetric component and an iterative algorithm to calculate the symmetric component, the method can calibrate the spherical reference surface with high accuracy. An experiment is presented to verify the validity of the absolute testing method. The reference surface deviation measured with the absolute testing method agrees well with that of random- ball-averaging testing method; the root mean square of the residual figure between them is ∼0.8 nm. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE). 英文摘要: We present an absolute testing of a spherical reference surface of a Fizeau interferometer with the method of shift-rotation, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. With a new procedure to measure the rotationally asymmetric component and an iterative algorithm to calculate the symmetric component, the method can calibrate the spherical reference surface with high accuracy. An experiment is presented to verify the validity of the absolute testing method. The reference surface deviation measured with the absolute testing method agrees well with that of random- ball-averaging testing method; the root mean square of the residual figure between them is ∼0.8 nm. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE). 收录类别: SCI
; Ei
语种: 英语
WOS记录号: WOS:000318248000011
ISSN号: 00913286
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内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7018
Appears in Collections: 先光中心_期刊论文
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作者单位: 1. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu 610209, China
Recommended Citation:
Song, Weihong,Wu, Fan,Hou, Xi,et al. Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm[J]. Optical Engineering,2013,52(3):033601.
