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Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm
Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Wu, Gaofeng1,2; Liu, Bin1; Wan, Yongjian1
Source PublicationOptical Engineering
Volume52Issue:3Pages:033601
2013
Language英语
ISSN00913286
DOI10.1117/1.OE.52.3.033601
Indexed BySCI ; Ei
WOS IDWOS:000318248000011
Subtype期刊论文
AbstractWe present an absolute testing of a spherical reference surface of a Fizeau interferometer with the method of shift-rotation, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. With a new procedure to measure the rotationally asymmetric component and an iterative algorithm to calculate the symmetric component, the method can calibrate the spherical reference surface with high accuracy. An experiment is presented to verify the validity of the absolute testing method. The reference surface deviation measured with the absolute testing method agrees well with that of random- ball-averaging testing method; the root mean square of the residual figure between them is ∼0.8 nm. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE).; We present an absolute testing of a spherical reference surface of a Fizeau interferometer with the method of shift-rotation, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. With a new procedure to measure the rotationally asymmetric component and an iterative algorithm to calculate the symmetric component, the method can calibrate the spherical reference surface with high accuracy. An experiment is presented to verify the validity of the absolute testing method. The reference surface deviation measured with the absolute testing method agrees well with that of random- ball-averaging testing method; the root mean square of the residual figure between them is ∼0.8 nm. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE).
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Cited Times:6[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7018
Collection先光中心
Affiliation1. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Song, Weihong,Wu, Fan,Hou, Xi,et al. Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm[J]. Optical Engineering,2013,52(3):033601.
APA Song, Weihong,Wu, Fan,Hou, Xi,Wu, Gaofeng,Liu, Bin,&Wan, Yongjian.(2013).Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm.Optical Engineering,52(3),033601.
MLA Song, Weihong,et al."Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm".Optical Engineering 52.3(2013):033601.
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