| Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm | |
| Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Wu, Gaofeng1,2; Liu, Bin1; Wan, Yongjian1 | |
| Source Publication | Optical Engineering
 |
| Volume | 52Issue:3Pages:033601 |
| 2013 | |
| Language | 英语 |
| ISSN | 00913286 |
| DOI | 10.1117/1.OE.52.3.033601 |
| Indexed By | SCI ; Ei |
| WOS ID | WOS:000318248000011 |
| Subtype | 期刊论文 |
| Abstract | We present an absolute testing of a spherical reference surface of a Fizeau interferometer with the method of shift-rotation, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. With a new procedure to measure the rotationally asymmetric component and an iterative algorithm to calculate the symmetric component, the method can calibrate the spherical reference surface with high accuracy. An experiment is presented to verify the validity of the absolute testing method. The reference surface deviation measured with the absolute testing method agrees well with that of random- ball-averaging testing method; the root mean square of the residual figure between them is ∼0.8 nm. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE).; We present an absolute testing of a spherical reference surface of a Fizeau interferometer with the method of shift-rotation, which relies on the decomposition of the surface deviation into rotationally asymmetric and symmetric components. With a new procedure to measure the rotationally asymmetric component and an iterative algorithm to calculate the symmetric component, the method can calibrate the spherical reference surface with high accuracy. An experiment is presented to verify the validity of the absolute testing method. The reference surface deviation measured with the absolute testing method agrees well with that of random- ball-averaging testing method; the root mean square of the residual figure between them is ∼0.8 nm. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE). |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/7018 |
| Collection | 先光中心 |
| Affiliation | 1. Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu 610209, China 2. University of Chinese Academy of Sciences, Beijing 100039, China |
| Recommended Citation GB/T 7714 | Song, Weihong,Wu, Fan,Hou, Xi,et al. Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm[J]. Optical Engineering,2013,52(3):033601. |
| APA | Song, Weihong,Wu, Fan,Hou, Xi,Wu, Gaofeng,Liu, Bin,&Wan, Yongjian.(2013).Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm.Optical Engineering,52(3),033601. |
| MLA | Song, Weihong,et al."Absolute calibration of a spherical reference surface for a Fizeau interferometer with the shift-rotation method of iterative algorithm".Optical Engineering 52.3(2013):033601. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2013-2096.pdf（4819KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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