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Optimized absolute testing method of shift-rotation
Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Wan, Yongjian1; Song, W. (songscu@163.com)
Source PublicationApplied Optics
Volume52Issue:28Pages:7028-7032
2013
Language英语
ISSN1559128X
DOI10.1364/AO.52.007028
Indexed BySCI ; Ei
WOS IDWOS:000325216900021
Subtype期刊论文
AbstractThe absolute testing method of shift-rotation that combines the traditional N-position method and Zernike polynomial fitting has been commonly employed in surface metrology. It preserves the high spatial frequency of the surface deviation with the N-position method to obtain the rotationally asymmetric surface deviation, but it suffers the kN? order angular terms errors missed by the N-position method when it calculates the rotationally symmetric surface deviation with the Zernike rotationally symmetric polynomial fitting method. An optimized absolute testing method of shift-rotation is presented in this paper. It considers the missing kN? order errors when the equations of the rotationally symmetric surface deviation are solved. As a result, it is more accurate than the traditional method. Experimental absolute results of spherical surfaces are given. © 2013 Optical Society of America.; The absolute testing method of shift-rotation that combines the traditional N-position method and Zernike polynomial fitting has been commonly employed in surface metrology. It preserves the high spatial frequency of the surface deviation with the N-position method to obtain the rotationally asymmetric surface deviation, but it suffers the kN? order angular terms errors missed by the N-position method when it calculates the rotationally symmetric surface deviation with the Zernike rotationally symmetric polynomial fitting method. An optimized absolute testing method of shift-rotation is presented in this paper. It considers the missing kN? order errors when the equations of the rotationally symmetric surface deviation are solved. As a result, it is more accurate than the traditional method. Experimental absolute results of spherical surfaces are given. © 2013 Optical Society of America.
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Cited Times:8[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7017
Collection先光中心
Corresponding AuthorSong, W. (songscu@163.com)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Song, Weihong,Wu, Fan,Hou, Xi,et al. Optimized absolute testing method of shift-rotation[J]. Applied Optics,2013,52(28):7028-7032.
APA Song, Weihong,Wu, Fan,Hou, Xi,Wan, Yongjian,&Song, W. .(2013).Optimized absolute testing method of shift-rotation.Applied Optics,52(28),7028-7032.
MLA Song, Weihong,et al."Optimized absolute testing method of shift-rotation".Applied Optics 52.28(2013):7028-7032.
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