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题名:
Optimized absolute testing method of shift-rotation
作者: Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Wan, Yongjian1
刊名: Applied Optics
出版日期: 2013
卷号: 52, 期号:28, 页码:7028-7032
学科分类: Errors - Optimization
DOI: 10.1364/AO.52.007028
通讯作者: Song, W. (songscu@163.com)
文章类型: 期刊论文
中文摘要: The absolute testing method of shift-rotation that combines the traditional N-position method and Zernike polynomial fitting has been commonly employed in surface metrology. It preserves the high spatial frequency of the surface deviation with the N-position method to obtain the rotationally asymmetric surface deviation, but it suffers the kN? order angular terms errors missed by the N-position method when it calculates the rotationally symmetric surface deviation with the Zernike rotationally symmetric polynomial fitting method. An optimized absolute testing method of shift-rotation is presented in this paper. It considers the missing kN? order errors when the equations of the rotationally symmetric surface deviation are solved. As a result, it is more accurate than the traditional method. Experimental absolute results of spherical surfaces are given. © 2013 Optical Society of America.
英文摘要: The absolute testing method of shift-rotation that combines the traditional N-position method and Zernike polynomial fitting has been commonly employed in surface metrology. It preserves the high spatial frequency of the surface deviation with the N-position method to obtain the rotationally asymmetric surface deviation, but it suffers the kN? order angular terms errors missed by the N-position method when it calculates the rotationally symmetric surface deviation with the Zernike rotationally symmetric polynomial fitting method. An optimized absolute testing method of shift-rotation is presented in this paper. It considers the missing kN? order errors when the equations of the rotationally symmetric surface deviation are solved. As a result, it is more accurate than the traditional method. Experimental absolute results of spherical surfaces are given. © 2013 Optical Society of America.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000325216900021
ISSN号: 1559128X
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7017
Appears in Collections:先光中心_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Song, Weihong,Wu, Fan,Hou, Xi,et al. Optimized absolute testing method of shift-rotation[J]. Applied Optics,2013,52(28):7028-7032.
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