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题名:
Quantitative measurement of large-aperture aspheric surfaces by off-axis Ronchi test
作者: Guo, Chunfeng1; Su, Xianyu1; Chen, Wenjing1; Lei, Baiping2; Wu, Fan2
刊名: Optics and Lasers in Engineering
出版日期: 2012
卷号: 50, 期号:2, 页码:165-169
学科分类: Aspherics - Computer simulation - Experiments - Mirrors - Surface measurement
DOI: 10.1016/j.optlaseng.2011.09.010
通讯作者: Su, X. (xianyusu@mail.sc.cninfo.net)
文章类型: 期刊论文
中文摘要: An off-axis Ronchi test based on the phase-shifting technique is presented to measure the aspheric mirror quantitatively. In this paper, slopes of deviations from the mirrors ideal aspheric shape are derived when an off-axis point source is used. By integrating these slopes, the deviations of the shape are obtained and then the tested shape can be reconstructed. Compared with the coaxial Ronchi test, the measurement error caused by combination fringes can be avoided, and this system is more flexible. In the experiment, a marked point is used to guide the phase unwrapping procedure, which improves the accuracy of extracting corresponding phase points. In addition, the method has strong anti-noise ability. The validity of the method has been verified by both computer simulations and a preliminary experiment. © 2011 Elsevier Ltd. All rights reserved.
英文摘要: An off-axis Ronchi test based on the phase-shifting technique is presented to measure the aspheric mirror quantitatively. In this paper, slopes of deviations from the mirrors ideal aspheric shape are derived when an off-axis point source is used. By integrating these slopes, the deviations of the shape are obtained and then the tested shape can be reconstructed. Compared with the coaxial Ronchi test, the measurement error caused by combination fringes can be avoided, and this system is more flexible. In the experiment, a marked point is used to guide the phase unwrapping procedure, which improves the accuracy of extracting corresponding phase points. In addition, the method has strong anti-noise ability. The validity of the method has been verified by both computer simulations and a preliminary experiment. © 2011 Elsevier Ltd. All rights reserved.
收录类别: Ei
项目资助者: National Natural Science Foundation of China [60838002]
语种: 英语
WOS记录号: WOS:000297872800010
ISSN号: 01438166
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7009
Appears in Collections:先光中心_期刊论文

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作者单位: 1. Department of Opto-Electronics, Sichuan University, Chengdu 610064, China
2. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

Recommended Citation:
Guo, Chunfeng,Su, Xianyu,Chen, Wenjing,et al. Quantitative measurement of large-aperture aspheric surfaces by off-axis Ronchi test[J]. Optics and Lasers in Engineering,2012,50(2):165-169.
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