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题名:
Method to test rotationally asymmetric surface deviation with high accuracy
作者: Song, Weihong1,2; Wu, Fan1; Hou, Xi1
刊名: Applied Optics
出版日期: 2012
卷号: 51, 期号:22, 页码:5567-5572
学科分类: Molecular physics - Optics
DOI: 10.1364/AO.51.005567
通讯作者: Song, W. (songscu@163.com)
文章类型: 期刊论文
中文摘要: We have proposed a new absolute method to test rotationally asymmetric surface deviation. Relying on the high accuracy of Zernike polynomial fitting with least-squares algorithm for the low-frequency component and preserving the high-frequency component with the averaging method, the new method can guarantee the high accuracy of the measurement result with fewer rotational measurements compared to the traditional multiangle averaging method. It realizes a balance between the accuracy and efficiency of the measurements. It has been verified by experiments; the root mean square (rms) of residual figure between the two methods is ∼0.6 nm. Meanwhile, the new method can suppress environmental noise introduced in measurement results well. © 2012 Optical Society of America.
英文摘要: We have proposed a new absolute method to test rotationally asymmetric surface deviation. Relying on the high accuracy of Zernike polynomial fitting with least-squares algorithm for the low-frequency component and preserving the high-frequency component with the averaging method, the new method can guarantee the high accuracy of the measurement result with fewer rotational measurements compared to the traditional multiangle averaging method. It realizes a balance between the accuracy and efficiency of the measurements. It has been verified by experiments; the root mean square (rms) of residual figure between the two methods is ∼0.6 nm. Meanwhile, the new method can suppress environmental noise introduced in measurement results well. © 2012 Optical Society of America.
收录类别: Ei
项目资助者: National Natural Science Foundation of China (NSFC) [60908042]
语种: 英语
WOS记录号: WOS:000307160600028
ISSN号: 1559128X
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/7007
Appears in Collections:先光中心_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate University, Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Song, Weihong,Wu, Fan,Hou, Xi. Method to test rotationally asymmetric surface deviation with high accuracy[J]. Applied Optics,2012,51(22):5567-5572.
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