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Method to test rotationally asymmetric surface deviation with high accuracy
Song, Weihong1,2; Wu, Fan1; Hou, Xi1; Song, W. (songscu@163.com)
Source PublicationApplied Optics
Volume51Issue:22Pages:5567-5572
2012
Language英语
ISSN1559128X
DOI10.1364/AO.51.005567
Indexed ByEi
WOS IDWOS:000307160600028
Subtype期刊论文
AbstractWe have proposed a new absolute method to test rotationally asymmetric surface deviation. Relying on the high accuracy of Zernike polynomial fitting with least-squares algorithm for the low-frequency component and preserving the high-frequency component with the averaging method, the new method can guarantee the high accuracy of the measurement result with fewer rotational measurements compared to the traditional multiangle averaging method. It realizes a balance between the accuracy and efficiency of the measurements. It has been verified by experiments; the root mean square (rms) of residual figure between the two methods is ∼0.6 nm. Meanwhile, the new method can suppress environmental noise introduced in measurement results well. © 2012 Optical Society of America.; We have proposed a new absolute method to test rotationally asymmetric surface deviation. Relying on the high accuracy of Zernike polynomial fitting with least-squares algorithm for the low-frequency component and preserving the high-frequency component with the averaging method, the new method can guarantee the high accuracy of the measurement result with fewer rotational measurements compared to the traditional multiangle averaging method. It realizes a balance between the accuracy and efficiency of the measurements. It has been verified by experiments; the root mean square (rms) of residual figure between the two methods is ∼0.6 nm. Meanwhile, the new method can suppress environmental noise introduced in measurement results well. © 2012 Optical Society of America.
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Cited Times:20[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/7007
Collection先光中心
Corresponding AuthorSong, W. (songscu@163.com)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate University, Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Song, Weihong,Wu, Fan,Hou, Xi,et al. Method to test rotationally asymmetric surface deviation with high accuracy[J]. Applied Optics,2012,51(22):5567-5572.
APA Song, Weihong,Wu, Fan,Hou, Xi,&Song, W. .(2012).Method to test rotationally asymmetric surface deviation with high accuracy.Applied Optics,51(22),5567-5572.
MLA Song, Weihong,et al."Method to test rotationally asymmetric surface deviation with high accuracy".Applied Optics 51.22(2012):5567-5572.
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