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基于平移旋转的球面绝对检测技术仿真分析
宋伟红; 伍凡; 侯溪; 杨鹏
Source Publication强激光与粒子束
Volume23Issue:12Pages:3229-3234
2011
Language中文
Subtype期刊论文
Abstract基于平移旋转的球面绝对检测技术是一种实现高精度面形测量的有效手段。通过绕光轴多次等角度旋转被测球面测得被测面面形误差的旋转非对称部分,并由共心平移被测球面恢复出被测面面形误差的旋转对称部分,合成即可得到被测球面完整的面形信息。详细推导了平移旋转法的理论公式,并进行了仿真分析。仿真结果表明,基于上述方法获得的被测球面面形误差与初始面形误差残差图的均方根值为5.300 0×10-12 nm,其与初始面形误差均方根值的比值为1.164 1×10-12,理论误差极小,满足高精度面形检测要求。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6987
Collection先光中心
Corresponding Author宋伟红
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
宋伟红,伍凡,侯溪,等. 基于平移旋转的球面绝对检测技术仿真分析[J]. 强激光与粒子束,2011,23(12):3229-3234.
APA 宋伟红,伍凡,侯溪,&杨鹏.(2011).基于平移旋转的球面绝对检测技术仿真分析.强激光与粒子束,23(12),3229-3234.
MLA 宋伟红,et al."基于平移旋转的球面绝对检测技术仿真分析".强激光与粒子束 23.12(2011):3229-3234.
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