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高精度干涉仪镜头支撑结构的光机集成分析
张娟; 吴永前; 伍凡; 吴高峰
Source Publication光电工程
Volume38Issue:10Pages:146-150
2011
Language中文
Subtype期刊论文
Abstract根据高精度干涉仪镜头的工作状况,给出了平放时镜头的装卡方式。用Ansys Workbench有限元分析软件对镜头由重力、支撑结构所导致的面形变化进行仿真分析,在对光机结构进行有限元分析的基础上,反复优化镜头机械结构设计,从而使支撑结构引起的系统误差降到最低,以Zernike多项式为接口工具拟合镜面变形,评估了该支撑结构对镜头光学性能的影响。分析结果表明,在该支撑方式下,干涉仪镜头引入的波像差的均方根值RMS<1/50λ,满足像质要求。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6984
Collection先光中心
Corresponding Author张娟
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
张娟,吴永前,伍凡,等. 高精度干涉仪镜头支撑结构的光机集成分析[J]. 光电工程,2011,38(10):146-150.
APA 张娟,吴永前,伍凡,&吴高峰.(2011).高精度干涉仪镜头支撑结构的光机集成分析.光电工程,38(10),146-150.
MLA 张娟,et al."高精度干涉仪镜头支撑结构的光机集成分析".光电工程 38.10(2011):146-150.
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