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题名:
Ultra-precision figuring using submerged jet polishing
作者: Shi CY; Wu F; Wan YJ
刊名: CHINESE OPTICS LETTERS
出版日期: 2011
卷号: 9, 期号:9, 页码:092201
通讯作者: Shi CY (Shi Chunyan)
文章类型: 期刊论文
中文摘要: A new removal optimization method called submerged jet polishing (SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic (PV) 0.066 lambda to 0.024 lambda (lambda = 632.8 nm) after three iterations, and the root mean square (RMS) value is improved from 0.013 lambda to 0.00395 lambda. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.
英文摘要: A new removal optimization method called submerged jet polishing (SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic (PV) 0.066 lambda to 0.024 lambda (lambda = 632.8 nm) after three iterations, and the root mean square (RMS) value is improved from 0.013 lambda to 0.00395 lambda. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.
语种: 英语
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6982
Appears in Collections:先光中心_期刊论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Shi CY,Wu F,Wan YJ. Ultra-precision figuring using submerged jet polishing[J]. CHINESE OPTICS LETTERS,2011,9(9):092201.
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