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Ultra-precision figuring using submerged jet polishing
Shi CY; Wu F; Wan YJ; Shi CY (Shi Chunyan)
Source PublicationCHINESE OPTICS LETTERS
Volume9Issue:9Pages:092201
2011
Language英语
Subtype期刊论文
AbstractA new removal optimization method called submerged jet polishing (SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic (PV) 0.066 lambda to 0.024 lambda (lambda = 632.8 nm) after three iterations, and the root mean square (RMS) value is improved from 0.013 lambda to 0.00395 lambda. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.; A new removal optimization method called submerged jet polishing (SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic (PV) 0.066 lambda to 0.024 lambda (lambda = 632.8 nm) after three iterations, and the root mean square (RMS) value is improved from 0.013 lambda to 0.00395 lambda. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6982
Collection先光中心
Corresponding AuthorShi CY (Shi Chunyan)
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Shi CY,Wu F,Wan YJ,et al. Ultra-precision figuring using submerged jet polishing[J]. CHINESE OPTICS LETTERS,2011,9(9):092201.
APA Shi CY,Wu F,Wan YJ,&Shi CY .(2011).Ultra-precision figuring using submerged jet polishing.CHINESE OPTICS LETTERS,9(9),092201.
MLA Shi CY,et al."Ultra-precision figuring using submerged jet polishing".CHINESE OPTICS LETTERS 9.9(2011):092201.
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