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题名:
Comparative experimental study on absolute measurement of spherical surface with two-sphere method
作者: Hou X; Yang P; Wu F; Wan YJ
刊名: OPTICS AND LASERS IN ENGINEERING
出版日期: 2011
卷号: 49, 期号:7, 页码:833-840
通讯作者: Hou X (Hou Xi)
文章类型: 期刊论文
中文摘要: The two-sphere method with multiple confocal measurements and a "cat's-eye" measurement is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We provide a comparative experimental study on absolute testing procedures for spherical surface with two-sphere method, which include the classical Jensen method with three position measurements, the Zygo method with five position measurements and a variant of the Jensen method. The variant of the Jensen method can combine the multiple "three-position" measurements based on the fiducial method and averaging method. The repeatability of the involved absolute measurement methods is also studied by the five set experiments, and the corresponding Zernike fitting coefficients are compared in detail. The experimental results are meaningful for implementation of two-sphere method with higher repeatability in practice. (C) 2011 Elsevier Ltd. All rights reserved.
英文摘要: The two-sphere method with multiple confocal measurements and a "cat's-eye" measurement is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We provide a comparative experimental study on absolute testing procedures for spherical surface with two-sphere method, which include the classical Jensen method with three position measurements, the Zygo method with five position measurements and a variant of the Jensen method. The variant of the Jensen method can combine the multiple "three-position" measurements based on the fiducial method and averaging method. The repeatability of the involved absolute measurement methods is also studied by the five set experiments, and the corresponding Zernike fitting coefficients are compared in detail. The experimental results are meaningful for implementation of two-sphere method with higher repeatability in practice. (C) 2011 Elsevier Ltd. All rights reserved.
语种: 英语
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6980
Appears in Collections:先光中心_期刊论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Hou X,Yang P,Wu F,et al. Comparative experimental study on absolute measurement of spherical surface with two-sphere method[J]. OPTICS AND LASERS IN ENGINEERING,2011,49(7):833-840.
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