| Comparative experimental study on absolute measurement of spherical surface with two-sphere method | |
| Hou X; Yang P; Wu F; Wan YJ; Hou X (Hou Xi) | |
| Source Publication | OPTICS AND LASERS IN ENGINEERING
 |
| Volume | 49Issue:7Pages:833-840 |
| 2011 | |
| Language | 英语 |
| Subtype | 期刊论文 |
| Abstract | The two-sphere method with multiple confocal measurements and a "cat's-eye" measurement is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We provide a comparative experimental study on absolute testing procedures for spherical surface with two-sphere method, which include the classical Jensen method with three position measurements, the Zygo method with five position measurements and a variant of the Jensen method. The variant of the Jensen method can combine the multiple "three-position" measurements based on the fiducial method and averaging method. The repeatability of the involved absolute measurement methods is also studied by the five set experiments, and the corresponding Zernike fitting coefficients are compared in detail. The experimental results are meaningful for implementation of two-sphere method with higher repeatability in practice. (C) 2011 Elsevier Ltd. All rights reserved.; The two-sphere method with multiple confocal measurements and a "cat's-eye" measurement is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We provide a comparative experimental study on absolute testing procedures for spherical surface with two-sphere method, which include the classical Jensen method with three position measurements, the Zygo method with five position measurements and a variant of the Jensen method. The variant of the Jensen method can combine the multiple "three-position" measurements based on the fiducial method and averaging method. The repeatability of the involved absolute measurement methods is also studied by the five set experiments, and the corresponding Zernike fitting coefficients are compared in detail. The experimental results are meaningful for implementation of two-sphere method with higher repeatability in practice. (C) 2011 Elsevier Ltd. All rights reserved. |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/6980 |
| Collection | 先光中心 |
| Corresponding Author | Hou X (Hou Xi) |
| Affiliation | 中国科学院光电技术研究所 |
| Recommended Citation GB/T 7714 | Hou X,Yang P,Wu F,et al. Comparative experimental study on absolute measurement of spherical surface with two-sphere method[J]. OPTICS AND LASERS IN ENGINEERING,2011,49(7):833-840. |
| APA | Hou X,Yang P,Wu F,Wan YJ,&Hou X .(2011).Comparative experimental study on absolute measurement of spherical surface with two-sphere method.OPTICS AND LASERS IN ENGINEERING,49(7),833-840. |
| MLA | Hou X,et al."Comparative experimental study on absolute measurement of spherical surface with two-sphere method".OPTICS AND LASERS IN ENGINEERING 49.7(2011):833-840. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2011-13-001.pdf（1574KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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