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Comparative experimental study on absolute measurement of spherical surface with two-sphere method
Hou X; Yang P; Wu F; Wan YJ; Hou X (Hou Xi)
Source PublicationOPTICS AND LASERS IN ENGINEERING
Volume49Issue:7Pages:833-840
2011
Language英语
Subtype期刊论文
AbstractThe two-sphere method with multiple confocal measurements and a "cat's-eye" measurement is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We provide a comparative experimental study on absolute testing procedures for spherical surface with two-sphere method, which include the classical Jensen method with three position measurements, the Zygo method with five position measurements and a variant of the Jensen method. The variant of the Jensen method can combine the multiple "three-position" measurements based on the fiducial method and averaging method. The repeatability of the involved absolute measurement methods is also studied by the five set experiments, and the corresponding Zernike fitting coefficients are compared in detail. The experimental results are meaningful for implementation of two-sphere method with higher repeatability in practice. (C) 2011 Elsevier Ltd. All rights reserved.; The two-sphere method with multiple confocal measurements and a "cat's-eye" measurement is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We provide a comparative experimental study on absolute testing procedures for spherical surface with two-sphere method, which include the classical Jensen method with three position measurements, the Zygo method with five position measurements and a variant of the Jensen method. The variant of the Jensen method can combine the multiple "three-position" measurements based on the fiducial method and averaging method. The repeatability of the involved absolute measurement methods is also studied by the five set experiments, and the corresponding Zernike fitting coefficients are compared in detail. The experimental results are meaningful for implementation of two-sphere method with higher repeatability in practice. (C) 2011 Elsevier Ltd. All rights reserved.
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6980
Collection先光中心
Corresponding AuthorHou X (Hou Xi)
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Hou X,Yang P,Wu F,et al. Comparative experimental study on absolute measurement of spherical surface with two-sphere method[J]. OPTICS AND LASERS IN ENGINEERING,2011,49(7):833-840.
APA Hou X,Yang P,Wu F,Wan YJ,&Hou X .(2011).Comparative experimental study on absolute measurement of spherical surface with two-sphere method.OPTICS AND LASERS IN ENGINEERING,49(7),833-840.
MLA Hou X,et al."Comparative experimental study on absolute measurement of spherical surface with two-sphere method".OPTICS AND LASERS IN ENGINEERING 49.7(2011):833-840.
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