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Department先光中心
单晶硅镜面超光滑表面工艺技术研究
徐清兰; 伍凡; 吴时彬
Source Publication光电工程
Volume30Issue:5Pages:69~72
2003
Language中文
ISSN1003-501x
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/692
Collection先光中心
Corresponding Author徐清兰
Recommended Citation
GB/T 7714
徐清兰,伍凡,吴时彬. 单晶硅镜面超光滑表面工艺技术研究[J]. 光电工程,2003,30(5):69~72.
APA 徐清兰,伍凡,&吴时彬.(2003).单晶硅镜面超光滑表面工艺技术研究.光电工程,30(5),69~72.
MLA 徐清兰,et al."单晶硅镜面超光滑表面工艺技术研究".光电工程 30.5(2003):69~72.
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