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An electrostatically actuated MEMS tilting mirror based on self-assembly
Wang, Qiang1,2; Wang, Weimin1,2; Qiu, Chuankai1; Yu, Junsheng2
Source PublicationQiangjiguang Yu Lizishu/High Power Laser and Particle Beams
Volume27Issue:2Pages:024127
2015
Language英语
ISSN1001-4322
DOI10.11884/HPLPB201527.024127
Indexed ByEi
Subtype期刊论文
AbstractAn electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6° with 200 thermal anneal. The tilting mirror has potential to be implemented for mirco-opto-electro-mechanical systems (MOEMS). ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved.; An electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6° with 200 thermal anneal. The tilting mirror has potential to be implemented for mirco-opto-electro-mechanical systems (MOEMS). ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6908
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorQiu, Chuankai
Affiliation1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, China
Recommended Citation
GB/T 7714
Wang, Qiang,Wang, Weimin,Qiu, Chuankai,et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams,2015,27(2):024127.
APA Wang, Qiang,Wang, Weimin,Qiu, Chuankai,&Yu, Junsheng.(2015).An electrostatically actuated MEMS tilting mirror based on self-assembly.Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams,27(2),024127.
MLA Wang, Qiang,et al."An electrostatically actuated MEMS tilting mirror based on self-assembly".Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams 27.2(2015):024127.
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