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题名:
An electrostatically actuated MEMS tilting mirror based on self-assembly
作者: Wang, Qiang1,2; Wang, Weimin1,2; Qiu, Chuankai1; Yu, Junsheng2
刊名: Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams
出版日期: 2015
卷号: 27, 期号:2, 页码:024127
学科分类: Electromechanical devices - Electrostatic actuators - Finite element method - Gold - MEMS - Mirrors - Residual stresses
DOI: 10.11884/HPLPB201527.024127
通讯作者: Qiu, Chuankai
文章类型: 期刊论文
中文摘要: An electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6° with 200 thermal anneal. The tilting mirror has potential to be implemented for mirco-opto-electro-mechanical systems (MOEMS). ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved.
英文摘要: An electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6° with 200 thermal anneal. The tilting mirror has potential to be implemented for mirco-opto-electro-mechanical systems (MOEMS). ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved.
收录类别: Ei
语种: 英语
ISSN号: 1001-4322
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6908
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_期刊论文

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作者单位: 1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China
2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, China

Recommended Citation:
Wang, Qiang,Wang, Weimin,Qiu, Chuankai,et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams,2015,27(2):024127.
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