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题名:
Elongating the Air Working Distance of Near-Field Plasmonic Lens by Surface Plasmon Illumination
作者: Zhang, Wei; Wang, Hao; Wang, Changtao; Yao, Na; Zhao, Zeyu; Wang, Yanqin; Gao, Ping; Luo, Yunfei; Du, Wenjuan; Jiang, Bo; Luo, Xiangang
刊名: PLASMONICS
出版日期: 2015
卷号: 10, 期号:1, 页码:51-56
学科分类: Surface plasmons; Image formation theory; Superresolution; Nanolithography
DOI: 10.1007/s11468-014-9776-2
通讯作者: Luo, XG (reprint author), Chinese Acad Sci, State Key Lab Opt Technol Nanofabricat & Microeng, Inst Opt & Elect, POB 350, Chengdu 610209, Peoples R China.
文章类型: 期刊论文
中文摘要: A method is proposed and demonstrated to elongate the air working distance of near-field plasmonic lens with deep subwavelength resolution. It is done by employing surface plasmon illumination (SPI) with a high transverse wavevector and a plasmonic lens with a metal-dielectric-metal structure. Specially designed SPI source with subwavelength grating and multiple metal-dielectric films delivers the shifted spatial spectra components of mask patterns, which help to enhance plasmonic lens optical transfer ability of patterns' information even with a large air working distance. Moreover, a metal reflector serves to modulate the magnitude of the tangential and normal electric field components in the imaging region and brings the considerable improvement of imaging quality. Numerical simulations show that the maximum air working distance could reach 60 for 32 nm half-pitch resolution at 365 nm wavelength about six times that for the conventional superlens under normal illumination (NI). An approximate model of the air working distance elongation under SPI is given and agrees well with simulations.
英文摘要: A method is proposed and demonstrated to elongate the air working distance of near-field plasmonic lens with deep subwavelength resolution. It is done by employing surface plasmon illumination (SPI) with a high transverse wavevector and a plasmonic lens with a metal-dielectric-metal structure. Specially designed SPI source with subwavelength grating and multiple metal-dielectric films delivers the shifted spatial spectra components of mask patterns, which help to enhance plasmonic lens optical transfer ability of patterns' information even with a large air working distance. Moreover, a metal reflector serves to modulate the magnitude of the tangential and normal electric field components in the imaging region and brings the considerable improvement of imaging quality. Numerical simulations show that the maximum air working distance could reach 60 for 32 nm half-pitch resolution at 365 nm wavelength about six times that for the conventional superlens under normal illumination (NI). An approximate model of the air working distance elongation under SPI is given and agrees well with simulations.
收录类别: SCI
项目资助者: 973 Program of China [2013CBA01700] ; National Natural Science Funds [61138002, 61177013]
语种: 英语
WOS记录号: WOS:000348346300008
ISSN号: 1557-1955
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6906
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_期刊论文

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作者单位: 1.[Zhang, Wei
2.Wang, Changtao
3.Yao, Na
4.Zhao, Zeyu
5.Wang, Yanqin
6.Gao, Ping
7.Luo, Yunfei
8.Du, Wenjuan
9.Luo, Xiangang] Chinese Acad Sci, State Key Lab Opt Technol Nanofabricat & Microeng, Inst Opt & Elect, Chengdu 610209, Peoples R China
10.[Wang, Hao] Univ Elect Sci & Technol China, Sch Mechatron Engn, Chengdu 611731, Peoples R China
11.[Jiang, Bo] China Elect Technol Grp Corp, Res Inst 33, Taiyuan 030006, Peoples R China

Recommended Citation:
Zhang, Wei,Wang, Hao,Wang, Changtao,et al. Elongating the Air Working Distance of Near-Field Plasmonic Lens by Surface Plasmon Illumination[J]. PLASMONICS,2015,10(1):51-56.
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