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金属-介质多层膜超衍射材料频谱滤波特性
杜文娟; 王长涛; 赵泽宇; 姚纳; 罗先刚
Source Publication光电工程
Volume41Issue:11Pages:89-94
2014
Language中文
Subtype期刊论文
Abstract本文理论研究了金属-介质多层膜光学超衍射材料频谱滤波的物理机制。严格矢量分析光波在金属-介质多层膜中频谱耦合传输的带通行为规律,理论分析单元厚度、填充比、膜层材料虚部和Al/Mg F2多层膜对数对空间频谱的带通窗口和透射振幅的影响因素。研究表明单元厚度和填充比主要影响空间频谱的带通窗口,膜层材料虚部和膜层对数主要影响空间频谱的透射振幅。该研究结果有望应用于超分辨成像光刻、表面等离子体结构照明、表层显微和生物传感等领域。
Keyword表面等离子体 倏逝波 多层膜
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6870
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author杜文娟
Affiliation中国科学院光电技术研究所微细加工光学技术国家重点实验室
Recommended Citation
GB/T 7714
杜文娟,王长涛,赵泽宇,等. 金属-介质多层膜超衍射材料频谱滤波特性[J]. 光电工程,2014,41(11):89-94.
APA 杜文娟,王长涛,赵泽宇,姚纳,&罗先刚.(2014).金属-介质多层膜超衍射材料频谱滤波特性.光电工程,41(11),89-94.
MLA 杜文娟,et al."金属-介质多层膜超衍射材料频谱滤波特性".光电工程 41.11(2014):89-94.
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