IOE OpenIR  > 微细加工光学技术国家重点实验室(开放室)
Plane demagnifying nanolithography by hybrid hyperlens-superlens structure
Liang, Gaofeng1,2; Zhao, Zeyu2; Yao, Na2; Wang, Changtao2; Jiang, Bo3; Zhao, Qing1; Luo, Xiangang2; Zhao, Q. (zhaoq@uestc.edu.cn)
Source PublicationJournal of Nanophotonics
Volume8Issue:1Pages:083080
2014
Language英语
DOI10.1117/1.JNP.8.083080
Indexed BySCI ; Ei
WOS IDWOS:000339160200001
Subtype期刊论文
AbstractWe propose a hybrid hyperlens-superlens structure to achieve demagnifying nanolithography. It consists of a core of planar superlens and a shell of cylinder hyperlens. In the nanolithography process, the shell of the cylinder hyperlens could demagnify the mask patterns to the interior cylinder interface, and then the core of the planar superlens transmits the demagnified patterns to the planar output photoresist layer. The performance of this hybrid hyperlens-superlens structure is analyzed for different periods and spacing of mask and demagnification factors. The numerical simulation results agree well with the theory. It is demonstrated that the hybrid structure could be used as a superresolution device for plane demagnifying nanolithography. © 2014 Society of Photo-Optical Instrumentation Engineers.; We propose a hybrid hyperlens-superlens structure to achieve demagnifying nanolithography. It consists of a core of planar superlens and a shell of cylinder hyperlens. In the nanolithography process, the shell of the cylinder hyperlens could demagnify the mask patterns to the interior cylinder interface, and then the core of the planar superlens transmits the demagnified patterns to the planar output photoresist layer. The performance of this hybrid hyperlens-superlens structure is analyzed for different periods and spacing of mask and demagnification factors. The numerical simulation results agree well with the theory. It is demonstrated that the hybrid structure could be used as a superresolution device for plane demagnifying nanolithography. © 2014 Society of Photo-Optical Instrumentation Engineers.
Citation statistics
Cited Times:8[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6861
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorZhao, Q. (zhaoq@uestc.edu.cn)
Affiliation1. University of Electronic Science and Technology of China, School of Physical Electronics, Chengdu 610054, China
2. Chinese Academy of Sciences, Institute of Optics and Electronics, State Key Lab of Optical Technologies on Nano-fabrication and Micro-engineering, Chengdu 610209, China
3. No. 33 Research Institute of China, Electronics Technology Group Corporation, Taiyuan 030006, China
Recommended Citation
GB/T 7714
Liang, Gaofeng,Zhao, Zeyu,Yao, Na,et al. Plane demagnifying nanolithography by hybrid hyperlens-superlens structure[J]. Journal of Nanophotonics,2014,8(1):083080.
APA Liang, Gaofeng.,Zhao, Zeyu.,Yao, Na.,Wang, Changtao.,Jiang, Bo.,...&Zhao, Q. .(2014).Plane demagnifying nanolithography by hybrid hyperlens-superlens structure.Journal of Nanophotonics,8(1),083080.
MLA Liang, Gaofeng,et al."Plane demagnifying nanolithography by hybrid hyperlens-superlens structure".Journal of Nanophotonics 8.1(2014):083080.
Files in This Item:
File Name/Size DocType Version Access License
2014-2040.pdf(1222KB)期刊论文作者接受稿开放获取CC BY-NC-SAView Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Liang, Gaofeng]'s Articles
[Zhao, Zeyu]'s Articles
[Yao, Na]'s Articles
Baidu academic
Similar articles in Baidu academic
[Liang, Gaofeng]'s Articles
[Zhao, Zeyu]'s Articles
[Yao, Na]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Liang, Gaofeng]'s Articles
[Zhao, Zeyu]'s Articles
[Yao, Na]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: 2014-2040.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.