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题名:
Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films
作者: Tang, Ping; Qiu, Chuankai; He, Jingjing; Zhang, Tiejun; Feng, Xiao; Luo, Xiangang
刊名: Journal of Materials Science: Materials in Electronics
出版日期: 2014
卷号: 25, 期号:10, 页码:4369-4374
学科分类: Deposits - Energy gap - Particle size - Thin films - X ray diffraction
DOI: 10.1007/s10854-014-2175-9
通讯作者: Luo, Xiangang
文章类型: 期刊论文
中文摘要: The effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films is investigated. X-ray diffraction patterns show that the crystallinity of the films is enhanced with the increasing of substrate temperature. Comparing the SEM images, both the particle size and density are increased at a higher deposition temperature. The lowest sheet resistance of 8.43 Ω/ is obtained at the substrate temperature of 350 °C. In addition, the average optical transmittance of the three films reaches up to 85 % in the visible range. The absorption coefficient is the lowest at 350 °C. The band gap increases from 3.36 to 3.61 eV while the electrical resistivity of SnO2:F thin films decreases from 8.51 × 10−3 to 9.86 × 10−4 Ω cm as elevating the substrate temperature from 250 to 350 °C.
英文摘要: The effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films is investigated. X-ray diffraction patterns show that the crystallinity of the films is enhanced with the increasing of substrate temperature. Comparing the SEM images, both the particle size and density are increased at a higher deposition temperature. The lowest sheet resistance of 8.43 Ω/ is obtained at the substrate temperature of 350 °C. In addition, the average optical transmittance of the three films reaches up to 85 % in the visible range. The absorption coefficient is the lowest at 350 °C. The band gap increases from 3.36 to 3.61 eV while the electrical resistivity of SnO2:F thin films decreases from 8.51 × 10−3 to 9.86 × 10−4 Ω cm as elevating the substrate temperature from 250 to 350 °C.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000342157500027
ISSN号: 09574522
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6860
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作者单位: State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, China

Recommended Citation:
Tang, Ping,Qiu, Chuankai,He, Jingjing,et al. Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films[J]. Journal of Materials Science: Materials in Electronics,2014,25(10):4369-4374.
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