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Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films
Tang, Ping; Qiu, Chuankai; He, Jingjing; Zhang, Tiejun; Feng, Xiao; Luo, Xiangang
Source PublicationJournal of Materials Science: Materials in Electronics
Volume25Issue:10Pages:4369-4374
2014
Language英语
ISSN09574522
DOI10.1007/s10854-014-2175-9
Indexed BySCI ; Ei
WOS IDWOS:000342157500027
Subtype期刊论文
AbstractThe effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films is investigated. X-ray diffraction patterns show that the crystallinity of the films is enhanced with the increasing of substrate temperature. Comparing the SEM images, both the particle size and density are increased at a higher deposition temperature. The lowest sheet resistance of 8.43 Ω/ is obtained at the substrate temperature of 350 °C. In addition, the average optical transmittance of the three films reaches up to 85 % in the visible range. The absorption coefficient is the lowest at 350 °C. The band gap increases from 3.36 to 3.61 eV while the electrical resistivity of SnO2:F thin films decreases from 8.51 × 10−3 to 9.86 × 10−4 Ω cm as elevating the substrate temperature from 250 to 350 °C.; The effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films is investigated. X-ray diffraction patterns show that the crystallinity of the films is enhanced with the increasing of substrate temperature. Comparing the SEM images, both the particle size and density are increased at a higher deposition temperature. The lowest sheet resistance of 8.43 Ω/ is obtained at the substrate temperature of 350 °C. In addition, the average optical transmittance of the three films reaches up to 85 % in the visible range. The absorption coefficient is the lowest at 350 °C. The band gap increases from 3.36 to 3.61 eV while the electrical resistivity of SnO2:F thin films decreases from 8.51 × 10−3 to 9.86 × 10−4 Ω cm as elevating the substrate temperature from 250 to 350 °C.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6860
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorLuo, Xiangang
Affiliation State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, China
Recommended Citation
GB/T 7714
Tang, Ping,Qiu, Chuankai,He, Jingjing,et al. Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films[J]. Journal of Materials Science: Materials in Electronics,2014,25(10):4369-4374.
APA Tang, Ping,Qiu, Chuankai,He, Jingjing,Zhang, Tiejun,Feng, Xiao,&Luo, Xiangang.(2014).Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films.Journal of Materials Science: Materials in Electronics,25(10),4369-4374.
MLA Tang, Ping,et al."Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films".Journal of Materials Science: Materials in Electronics 25.10(2014):4369-4374.
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