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A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens
作者: Tao, Xing; Wang, Changtao; Zhao, Zeyu; Wang, Yanqin; Yao, Na; Luo, Xiangang
刊名: Applied Physics B: Lasers and Optics
出版日期: 2014
卷号: 114, 期号:4, 页码:545-550
学科分类: Dielectric films - Electric field measurement - Electric fields - Image quality - Imaging techniques
DOI: 10.1007/s00340-013-5558-3
通讯作者: Luo, X. (lxg@ioe.ac.cn)
文章类型: 期刊论文
中文摘要: Metamaterial composed of multistacked metal and dielectric films provides the access to ray tracing in subwavelength regions and to form a variety of transformation optical devices for manipulating light beyond the diffraction limit, such as hyperlens and cloak. In this paper, this method is employed to design planar hyperlens for demagnification imaging lithography. Variant ray route configurations are considered and compared for the sake of imaging quality as well as device structure complexity. It is found that specifically designed trajectory route from the object plane to the image plane help to yield imaging devices with uniform demagnification ratio and improved image quality. Then multiple similar imaging devices could be cascaded for further demagnification and reduce of structure complexity from the viewpoint of application. The imaging results with about 1/23 wavelength (16 nm) half-pitch resolution in the measure of electric field intensity are demonstrated with numerical simulations. Also presented are the imaging characteristic analyses including light intensity, demagnification ratio and resolution. © 2013 Springer-Verlag Berlin Heidelberg.
英文摘要: Metamaterial composed of multistacked metal and dielectric films provides the access to ray tracing in subwavelength regions and to form a variety of transformation optical devices for manipulating light beyond the diffraction limit, such as hyperlens and cloak. In this paper, this method is employed to design planar hyperlens for demagnification imaging lithography. Variant ray route configurations are considered and compared for the sake of imaging quality as well as device structure complexity. It is found that specifically designed trajectory route from the object plane to the image plane help to yield imaging devices with uniform demagnification ratio and improved image quality. Then multiple similar imaging devices could be cascaded for further demagnification and reduce of structure complexity from the viewpoint of application. The imaging results with about 1/23 wavelength (16 nm) half-pitch resolution in the measure of electric field intensity are demonstrated with numerical simulations. Also presented are the imaging characteristic analyses including light intensity, demagnification ratio and resolution. © 2013 Springer-Verlag Berlin Heidelberg.
收录类别: SCI ; Ei
项目资助者: 973 Program of China [2013CBA01700] ; Chinese Nature Science Grant [61138002, 61177013]
语种: 英语
WOS记录号: WOS:000332852200013
ISSN号: 09462171
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6852
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_期刊论文

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作者单位: State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China

Recommended Citation:
Tao, Xing,Wang, Changtao,Zhao, Zeyu,et al. A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens[J]. Applied Physics B: Lasers and Optics,2014,114(4):545-550.
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