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A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens
Tao, Xing; Wang, Changtao; Zhao, Zeyu; Wang, Yanqin; Yao, Na; Luo, Xiangang; Luo, X. (lxg@ioe.ac.cn)
Source PublicationApplied Physics B: Lasers and Optics
Volume114Issue:4Pages:545-550
2014
Language英语
ISSN09462171
DOI10.1007/s00340-013-5558-3
Indexed BySCI ; Ei
WOS IDWOS:000332852200013
Subtype期刊论文
AbstractMetamaterial composed of multistacked metal and dielectric films provides the access to ray tracing in subwavelength regions and to form a variety of transformation optical devices for manipulating light beyond the diffraction limit, such as hyperlens and cloak. In this paper, this method is employed to design planar hyperlens for demagnification imaging lithography. Variant ray route configurations are considered and compared for the sake of imaging quality as well as device structure complexity. It is found that specifically designed trajectory route from the object plane to the image plane help to yield imaging devices with uniform demagnification ratio and improved image quality. Then multiple similar imaging devices could be cascaded for further demagnification and reduce of structure complexity from the viewpoint of application. The imaging results with about 1/23 wavelength (16 nm) half-pitch resolution in the measure of electric field intensity are demonstrated with numerical simulations. Also presented are the imaging characteristic analyses including light intensity, demagnification ratio and resolution. © 2013 Springer-Verlag Berlin Heidelberg.; Metamaterial composed of multistacked metal and dielectric films provides the access to ray tracing in subwavelength regions and to form a variety of transformation optical devices for manipulating light beyond the diffraction limit, such as hyperlens and cloak. In this paper, this method is employed to design planar hyperlens for demagnification imaging lithography. Variant ray route configurations are considered and compared for the sake of imaging quality as well as device structure complexity. It is found that specifically designed trajectory route from the object plane to the image plane help to yield imaging devices with uniform demagnification ratio and improved image quality. Then multiple similar imaging devices could be cascaded for further demagnification and reduce of structure complexity from the viewpoint of application. The imaging results with about 1/23 wavelength (16 nm) half-pitch resolution in the measure of electric field intensity are demonstrated with numerical simulations. Also presented are the imaging characteristic analyses including light intensity, demagnification ratio and resolution. © 2013 Springer-Verlag Berlin Heidelberg.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6852
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorLuo, X. (lxg@ioe.ac.cn)
Affiliation State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China
Recommended Citation
GB/T 7714
Tao, Xing,Wang, Changtao,Zhao, Zeyu,et al. A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens[J]. Applied Physics B: Lasers and Optics,2014,114(4):545-550.
APA Tao, Xing.,Wang, Changtao.,Zhao, Zeyu.,Wang, Yanqin.,Yao, Na.,...&Luo, X. .(2014).A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens.Applied Physics B: Lasers and Optics,114(4),545-550.
MLA Tao, Xing,et al."A method for uniform demagnification imaging beyond the diffraction limit: Cascaded planar hyperlens".Applied Physics B: Lasers and Optics 114.4(2014):545-550.
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