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Dispersive element based on grating and tunable Fabry-Perot filter in miniature spectrometer
Shi, Zhendong1,2; Fang, Liang1; Zhou, Chongxi1; Zhou, C. (cxzhou@ioe.ac.cn)
Source PublicationApplied Optics
Volume53Issue:1Pages:76-81
2014
Language英语
ISSN1559128X
DOI10.1364/AO.53.000076
Indexed BySCI ; Ei
WOS IDWOS:000329034300012
Subtype期刊论文
AbstractWe present a new design for the integration of a tunable Fabry-Perot (FP) filter and the grating etched on top of the cavity (IGFP) in the miniature spectrometer. It is based on the predispersion of the grating with the capacity of spatial separation of the spectral component and filter effect of the tunable FP filter. The free spectral range (FSR) of the IGFP is determined by the FSR of the grating, and its resolution depends on the filtering capacity of the FP filter. In the experiment, the high-resolution and wavelength scanning process of the IGFP were demonstrated with a narrowband and broadband light source, respectively. The results of the sub-nanometer resolution agree well with those from a commercial optical spectrum analyzer. Further, the IGFP provides an effective approach to solve the problem of the decrease of spectral resolution in the miniaturization process. © 2014 Optical Society of America.; We present a new design for the integration of a tunable Fabry-Perot (FP) filter and the grating etched on top of the cavity (IGFP) in the miniature spectrometer. It is based on the predispersion of the grating with the capacity of spatial separation of the spectral component and filter effect of the tunable FP filter. The free spectral range (FSR) of the IGFP is determined by the FSR of the grating, and its resolution depends on the filtering capacity of the FP filter. In the experiment, the high-resolution and wavelength scanning process of the IGFP were demonstrated with a narrowband and broadband light source, respectively. The results of the sub-nanometer resolution agree well with those from a commercial optical spectrum analyzer. Further, the IGFP provides an effective approach to solve the problem of the decrease of spectral resolution in the miniaturization process. © 2014 Optical Society of America.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6849
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorZhou, C. (cxzhou@ioe.ac.cn)
Affiliation1. State Key Laboratory of Optical Technologies for Micro-Fabrication, Institute of Optics and Electronics, Chinese Academy of Science, Chengdu 610209, China
2. University of the Chinese Academy of Sciences, Beijing 100049, China
Recommended Citation
GB/T 7714
Shi, Zhendong,Fang, Liang,Zhou, Chongxi,et al. Dispersive element based on grating and tunable Fabry-Perot filter in miniature spectrometer[J]. Applied Optics,2014,53(1):76-81.
APA Shi, Zhendong,Fang, Liang,Zhou, Chongxi,&Zhou, C. .(2014).Dispersive element based on grating and tunable Fabry-Perot filter in miniature spectrometer.Applied Optics,53(1),76-81.
MLA Shi, Zhendong,et al."Dispersive element based on grating and tunable Fabry-Perot filter in miniature spectrometer".Applied Optics 53.1(2014):76-81.
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