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A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction
Wang, Weimin1,2,3; Hu, Fangrong4; Wang, Qiang1; Qiu, Chuankai1; Chen, Zexiang2; Yao, Jun1
Source PublicationAIP Advances
Volume4Issue:3Pages:031317
2014
Language英语
DOI10.1063/1.4867336
Indexed BySCI ; Ei
WOS IDWOS:000334213700018
Subtype期刊论文
AbstractA 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electro-mechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 μm and a fill factor of 95%. The DM can provide a 0.6 μm stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device. © Author(s) 2014.; A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electro-mechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 μm and a fill factor of 95%. The DM can provide a 0.6 μm stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device. © Author(s) 2014.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6848
Collection微细加工光学技术国家重点实验室(开放室)
Affiliation1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China
3. University of Chinese Academy of Sciences, Beijing 100049, China
4. College of Electronic Engineering and Automatization, Guilin University of Electronic Technology, Guilin 541004, China
Recommended Citation
GB/T 7714
Wang, Weimin,Hu, Fangrong,Wang, Qiang,et al. A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction[J]. AIP Advances,2014,4(3):031317.
APA Wang, Weimin,Hu, Fangrong,Wang, Qiang,Qiu, Chuankai,Chen, Zexiang,&Yao, Jun.(2014).A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction.AIP Advances,4(3),031317.
MLA Wang, Weimin,et al."A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction".AIP Advances 4.3(2014):031317.
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