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题名:
A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction
作者: Wang, Weimin1,2,3; Hu, Fangrong4; Wang, Qiang1; Qiu, Chuankai1; Chen, Zexiang2; Yao, Jun1
刊名: AIP Advances
出版日期: 2014
卷号: 4, 期号:3, 页码:031317
学科分类: Aberrations - MEMS
DOI: 10.1063/1.4867336
文章类型: 期刊论文
中文摘要: A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electro-mechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 μm and a fill factor of 95%. The DM can provide a 0.6 μm stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device. © Author(s) 2014.
英文摘要: A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electro-mechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 μm and a fill factor of 95%. The DM can provide a 0.6 μm stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device. © Author(s) 2014.
收录类别: SCI ; Ei
项目资助者: Sichuan Youth Science and Technology Foundation [2011JQ0047] ; National Natural Science Foundation of China [60978051] ; National Science Foundation of China [61071027] ; Fundamental Research Funds for the Central Universities [ZYGX2010X012] ; [NCET-09-0260]
语种: 英语
WOS记录号: WOS:000334213700018
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6848
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_期刊论文

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作者单位: 1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China
3. University of Chinese Academy of Sciences, Beijing 100049, China
4. College of Electronic Engineering and Automatization, Guilin University of Electronic Technology, Guilin 541004, China

Recommended Citation:
Wang, Weimin,Hu, Fangrong,Wang, Qiang,et al. A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction[J]. AIP Advances,2014,4(3):031317.
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