Sichuan Youth Science and Technology Foundation [2011JQ0047]
; National Natural Science Foundation of China 
; National Science Foundation of China 
; Fundamental Research Funds for the Central Universities [ZYGX2010X012]
1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China 3. University of Chinese Academy of Sciences, Beijing 100049, China 4. College of Electronic Engineering and Automatization, Guilin University of Electronic Technology, Guilin 541004, China
Wang, Weimin,Hu, Fangrong,Wang, Qiang,et al. A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction[J]. AIP Advances,2014,4(3):031317.